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Vacuum pump, waterproof structure and control device applied to the vacuum pump

A technology for control devices and vacuum pumps, applied to components, pump devices, pumps, etc. of elastic fluid pumping devices, can solve problems such as intrusion, and achieve the effect of preventing water droplet intrusion and circuit safety

Active Publication Date: 2022-03-01
EDWARDS JAPAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, when the pump main body and the control device are separated, the water droplets may enter the connector connection part from the periphery of the pump main body.

Method used

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  • Vacuum pump, waterproof structure and control device applied to the vacuum pump
  • Vacuum pump, waterproof structure and control device applied to the vacuum pump
  • Vacuum pump, waterproof structure and control device applied to the vacuum pump

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Embodiment Construction

[0043] Hereinafter, a first embodiment of the present invention will be described. exist figure 1 A structural diagram of a first embodiment of the present invention is shown. exist figure 1 In the middle, the pump body 100 and the control device 200 of the turbo molecule pump 10 are integrated.

[0044] A intlation port 101 is formed on the upper end of the cylindrical outer cylinder 127 of the pump body 100. The inner side of the outer cylinder 127 includes a rotating body 103, the aforementioned rotating body 103, a plurality of rotating wings 102a, 102b, 102c, · · · of the turbine blades for suction and discharging, and a plurality of layers.

[0045] A rotor shaft 113 is mounted in the center of the rotary body 103, which is suspended in air, for example, by means of a so-called 5-axis controlled magnetic bearing and is controlled.

[0046] The four electromagnets of the upper radial electromagnet 104 are configured as the radial axial axis of the rotor shaft 113 and is confi...

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Abstract

The present invention provides a vacuum pump that improves the efficiency of on-site maintenance work and prevents water from entering a connector connection portion when a cover is removed when a circuit is disconnected, a waterproof structure, and a control device applied to the vacuum pump. When performing maintenance work, the casing of the control device (200) is lowered by about tens of millimeters, and then the casing of the control device (200) is pulled out radially of the pump. Therefore, even if there is not enough free space in the axial direction of the vacuum pump, the pump main body (100) and the control device (200) can be easily attached and detached. On the side parts of the base part (129) and the control device (200), the wall part (202) is protrudingly arranged circumferentially. Therefore, even when the wall cover ( 201 ) is removed for maintenance work, the wall ( 202 ) can prevent intrusion of water droplets. Furthermore, the sealing member ( 219 ) and the cover ( 217 ) are inserted into the gap ( 210 ). Therefore, it is difficult for water droplets to intrude into the gap ( 210 ).

Description

Technical field [0001] The present invention relates to a vacuum pump and a waterproof structure applied to the vacuum pump, and more particularly to the efficiency of the maintenance operation in the field, and prevents water from being invaded to the connector connection to the connecting portion when the cover is removed. Waterproof structure, control device for vacuum pump. Background technique [0002] With the development of electronic engineering in recent years, the demand of semiconductors such as memory and integrated circuits have increased dramatically. [0003] These semiconductors are coated to impurities to impurities to impurities, or to form a subtle loop on the semiconductor substrate by etching. [0004] Further, these homeworks need to be carried out in the cavity of the high vacuum state in order to avoid dust in the air. The exhaust gas of the cavity is generally vacuum pump, but in particular, a turbo molecule pump as a vacuum pump is used as a vacuum pump ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04F04B37/16F04B39/00H01R13/52
CPCF04B37/16F04B39/00F04D19/04H01R13/52F04D25/068F04D29/522F04D25/0693F04D19/048F04D29/5853F04D19/042F04D29/083F05D2240/55F05D2210/12F04B37/14F04D17/168
Inventor 三枝健吾孙彦斌
Owner EDWARDS JAPAN