Method of preparing transmission electron microscope (TEM) sample for in-situ electrical test

Abstract

The invention provides a method of preparing a transmission electron microscope (TEM) sample for in-situ electrical test. The method at least comprises steps: a metal probe is firstly provided, and the tip end of the metal probe is smoothed to form a platform; a phase change memory device is then prepared on the surface of the platform, wherein the phase change memory device comprises a lower electrode layer, a phase change layer, and an upper electrode layer; a protective layer is then deposited on the surface of the upper electrode layer; with the protective layer as a mask, the phase changememory device is etched, and thin sheets are formed at two side edges of the platform; and the sheets are segmented to form a plurality of individual TEM samples. The problem of electrical connectionbetween a TEM sample and an in-situ electrical test TEM sample rod is solved, a step of extracting and transferring a sample to a Cu mesh required for TEM sample preparation by the conventional FIB is avoided, the sample preparation difficulty is reduced, the sample preparation success rate is improved, the sample preparation cost is greatly reduced, research and development on a new high-densitystorage phase change material are quickened, and a quick means is provided for research on reversible phase change behaviors and interface phase change behaviors.

Description

technical field [0001] The invention belongs to the technical field of transmission electron microscope sample preparation, and relates to a preparation method of a transmission electron microscope sample, in particular to a preparation method of a transmission electron microscope sample used for in-situ electrical testing. Background technique [0002] Transmission Electron Microscopy (TEM, Transmission Electron Microscopy) is one of the important technical means for the research and characterization of material structure, its spatial resolution can reach the picometer level, and it can observe the local fine structure of the material at the atomic scale and analyze the material structure. It is an important means of material science research to analyze the local components of the material. With the development of electron microscopy technology, there have been some new TEM supporting devices that provide in-situ application of heat, force, electricity, light and other exci...

AI Technical Summary

Problems solved by technology

[0003] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a method for preparing a transmission electron microscope sample for in-situ electrical testing, which is used to solve the problem of high-density phases that are difficult to prepare in the prior art for TEM sample preparation methods. The problem of using TEM samples for in-situ electrical testing of change materials, and innovatively solving the problem of using TEM samples for the observation of interface phase transition behavior and reversible phase transition behavior

Images