Method of quickly counting surface contaminations and damages of large-caliber optical component

A technology for optical components and surface contamination, which is applied in the direction of optical testing flaws/defects, etc., can solve problems such as difficult to achieve rapid resolution and statistics of surface contamination of large-caliber optical components, and achieve pollution and damage, easy to implement, intuitive and rapid resolution and statistical effect

Inactive Publication Date: 2019-06-04
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to solve the technical problem that it is difficult to realize the rapid resolution and statistics of surface contamination and damage of large-diameter optical components in the prior art, the present invention provides a method for quickly counting the surface contamination and damage of large-diameter optical components

Method used

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  • Method of quickly counting surface contaminations and damages of large-caliber optical component
  • Method of quickly counting surface contaminations and damages of large-caliber optical component
  • Method of quickly counting surface contaminations and damages of large-caliber optical component

Examples

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Embodiment 1

[0047] See figure 2 with image 3 , The fused silica vacuum window (430mm×430mm) from the upper and lower racks of the high-power laser device is vertically fixed on the sample stage, only the total reflection illumination line light source 1 is turned on, and the corresponding total reflection slit aperture 2 is adjusted. The width of the slit, the illuminating light introduced on the surface of the large-aperture optical element 7 is illuminated by total internal reflection. The damage on the surface of the large-aperture optical element 7 destroys the total reflection condition, and the illuminating light is scattered from the surface of the large-aperture optical element 7, and then Captured by the CCD camera 6, the scattering points appear as bright spots; the complete part of the surface of the large-aperture optical element 7 and the pollution position do not destroy the condition of total internal reflection, and the surface and the pollution of the large-aperture optica...

Embodiment 2

[0049] See Figure 4 with Figure 5 The difference between this embodiment and the first embodiment is that the fused silica vacuum window (430mm×430mm) is replaced with a large-diameter wedge lens (430mm×430mm). The wedge-shaped lens image of the side total reflection illumination is like Figure 4 As shown, the side low-angle grazing incident illumination wedge lens image is shown as Figure 5 Shown.

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Abstract

The invention discloses a method of quickly counting surface contaminations and damages of a large-caliber optical component. The method comprises the following steps: S1, the large-caliber optical component is placed in a darkroom; S2, a total-reflection illumination module is started and adjusted to enable light to be incident on the surface of the large-caliber optical component with a total reflection angle; S3, an image acquisition system is used for image acquisition on the surface of the large-caliber optical component; S4, the total-reflection illumination module is closed; S5, a low-angle incident illumination module is started and adjusted; and S6, the image acquisition system is used for image acquisition on the surface of the large-caliber optical component. By adopting the above method, a complicated process is avoided, quick discrimination and counting of the surface contaminations and damages of the large-caliber optical component can be realized simply, efficiently, andintuitively, and the problem that contaminations and damages can not be counted at the same time in the prior art can be solved.

Description

Technical field [0001] The invention relates to the technical field of surface recognition of large-aperture optical elements, in particular to a method for quickly counting contamination and damage on the surface of large-aperture optical elements. Background technique [0002] Large-scale high-power solid-state laser devices, such as the National Ignition Device (NIF), the French Megajoule Laser Device (LMJ) and the Chinese Shenguang series devices, use a large number of meter-sized large-aperture optical components. A typical NIF device is composed of 192 lasers and contains 7,360 large-aperture optical elements. However, due to factors such as the manufacturing and processing quality of the components and the cleanliness of the use environment, these expensive large-aperture optical components inevitably suffer from surface pollution and laser damage during the operation of large-scale high-power laser devices, which seriously affects the optical components. Stability and se...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/94
Inventor 王海军张传超王静轩陈静张丽娟蒋晓龙廖威栾晓雨蒋晓东
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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