The invention discloses a minimum
leak rate calibrating method based on the static
ion flow rising rate comparison method. By the adoption of the minimum
leak rate calibrating method based on the static
ion flow rising rate comparison method, the problem that according to a dynamic calibrating method, a minimum
leak rate signal is submersed by a background can be effectively solved, same-order comparison and calibration of minimum leak rates smaller than 10-10 Pa.m <3> / s are achieved, and the
lower limit of calibration of the leak rate is further extended. According to the minimum leak rate calibrating method based on the static
ion flow rising rate comparison method, a non-evaporating dispersion type
getter pump is additionally arranged in a calibration chamber, active gas such as the H2, the CO and the CO[2] can be sucked at a high speed through the non-evaporating dispersion type
getter pump,
inert gas such as the He and the Ar is not sucked, in this way, all gas, flowing into the calibration chamber, of a calibrated piece with the minimum leak rate is reserved, the concentration of leak indication gas in the calibration chamber is increased, the intensity of an
ion flow generated by the leak indication gas is increased, and then minimum leak rate comparison and calibration are achieved by measuring the leak rate of the calibrated piece with the minimum leak rate and the rising rate of the static state
ion flow generated by micro standard gas flow.