High-energy electron 3D imaging device and method

Abstract

The invention discloses a high-energy electron 3D imaging device and method, applied to the technical field of high-energy electron imaging. The high-energy electron 3D imaging device comprises an electron gun used for transmitting an electron beam; an accelerator used for accelerating the electron beam to acquire a high-energy electron beam; a beam transportation component used for transmitting the high-energy electron beam and controlling the beam quality of the high-energy electron beam; a rotary support used for holding a sample to be imaged and regulating a preset placement angle of the sample to be imaged; a detector system used for receiving the high-energy electron beam, acquiring a first image formed by receiving the high-energy electron beam, and storing the image data of the first image; a point-to-point magnetic lens imaging system used for amplifying the first image and regulating the definition of the first image; and a 3D rebuilding system used for processing the image data of the first image via a 3D rebuilding algorithm to acquire a 3D image of the sample to be imaged. According to the high-energy electron 3D imaging device and method provided by the invention, the3D imaging can be achieved, and the problem that at the present stage, the imaging technology only can achieve two-dimensional imaging can be effectively solved.

Description

technical field [0001] The present disclosure relates to the technical field of high-energy electron imaging, and in particular to a high-energy electron 3D imaging device and method. Background technique [0002] High-energy electron imaging is an important tool in the field of modern radiographic diagnosis. It utilizes the strong penetrating ability of high-energy electron beams to conduct imaging diagnostic research on relatively thick targets. Compared with other diagnostic methods, high-energy electron imaging has significant advantages: first, the cost of the electron accelerator it uses is relatively low; second, its imaging system is small, and it is easy to develop a device dedicated to imaging; third, its use The electron beam technology based on picosecond pulse width of photocathode is very mature, especially suitable for ultra-fast dynamic imaging; Fourth, the electron beam parameter control technology is relatively easy. [0003] However, conventional high-ene...

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Problems solved by technology

[0003] However, the conventional high-energy electron imaging method is mainly two-dimensional imaging, which cannot accurately reflect the three-dimensional structural information of the sample, and cannot truthfully give the image information in some specific situations.

For example, the projection of two samples on the xy plane has the same image, but there is a shape difference in the z-axis direction, and the conventional high-energy electron imaging method cannot distinguish this difference

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