The application discloses a
vacuum coating system and a
coating method thereof, and comprises the following steps: S1,
drying the target material, and placing the naturally cooled target material in a
crucible, and then sealing a lower shell; S2, placing a
single crystal germanium sheet and an
optical glass sheet as a substrate on a
flange at the bottom end of a placing cylinder, and sealing an upper shell; S3, vacuumizing the lower shell and the upper shell; and S4, starting an
electron gun corresponding to the
crucible, and generating a high-energy
electron beam to heat the target material to an
evaporation temperature, and after the target material evaporates, the target material moves upwards in the form of particles and is deposited on the surface of the substrate. The application adopts a design that multiple crucibles are distributed along a vertical direction and have coaxial lines, so that the
evaporation directions of the target materials in each
crucible are consistent. After the target materials in the crucibles are heated to the
evaporation temperature, the target materials move upwards in the vertical direction of the substrate, the position of the substrate is not frequently adjusted, the operation of the
coating process is simplified, the uniformity and efficiency of the
coating are improved, and the coating process is suitable for the requirements of multilayer and complex coating.