Method for automatically adjusting the crystal orientation through double-inclination sample stage of transmission electron microscopy

Abstract

The invention provides a method for automatically adjusting the crystal orientation through a double-inclination sample stage of a transmission electron microscopy. The method comprises the following steps: calibrating the double-inclination sample stage; recording a single-crystal electronic diffraction pattern of a positive zone axis, and a camera constant, and recording five readings X1, Y1, Z1, A1 and B1 of the double-inclination sample stage; calibrating the diffraction pattern by utilizing the known lattice type and parameters of a to-be-detected sample; determining a reference coordinate system through the projection positions of two rotating shafts of the double-inclination sample stage to obtain double-inclination stage readings X2, Y2, Z2, A2 and B2 needed by assigned orientation; and inputting the calculated X2, Y2, Z2, A2 and B2 values by a user through a control panel of the transmission electron microscopy, thus being capable of realizing the automatic tilting and translation process. The calculation process is easily programmed and realized, the dependence degree of an operator is reduced, the testing efficiency can be greatly improved, and the sample damage caused by long-time high-energy electronic beam radiation can also be avoided.

Description

【Technical Field】 [0001] The invention relates to a method for adjusting crystal orientation of a transmission electron microscope double-tilted sample stage. 【Background technique】 [0002] Transmission electron microscope is an important tool for studying the microstructure of crystalline materials. It can observe the morphology of the material at hundreds of thousands of times in the bright field mode, directly observe the atomic arrangement inside the crystal in the high-resolution mode, and analyze it in the diffraction mode The crystallographic information of the sample, and the above-mentioned different modes can be easily switched, so the transmission electron microscope has the irreplaceable advantages of other analytical instruments. [0003] When using a transmission electron microscope to characterize samples, the actual operation process often needs to adjust the orientation of the crystal. For example, high-resolution observation must be made under the condition of a ...

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Problems solved by technology

It should be noted that the tilting of the sample will cause changes in the shape of the observed feature points. Therefore, in the diffraction mode, the sample can only be tilted slightly each time. The original feature point cannot be found in the area

Not only that, but limited by the tilt range of the double-tilt sample stage, the above operations also face the risk of wasting all previous efforts. For example, through repeated tilting and translation operations, the sample is already close to the specified orientation, but the tilting range has reached the tilt of the double-tilt sample stage. The rotation limit cannot continue to tilt the sample, because whether it can be tilted to the specified orientation is not only related to the angle between the current orientation and the specified orientation, but also related to the angle between the reciprocal vector and the two tilt axes. Usually the latter is unknown

In particular, it should be pointed out that it is a very time-consuming task to tilt the sample to the specified orientation. The feature points are bombarded by high-energy electron beams for a long time, and crystal samples are prone to amorphization, even if they are finally tilted to the specified orientation. Orientation, defects caused by bombardment make subsequent characterization work meaningless

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