In-situ high-temperature quantitative mechanical experiment table for transmission electron microscope

Abstract

The embodiment of the invention relates to the technical field of material in-situ micro-nano experimental mechanics, and provides an in-situ high-temperature quantitative mechanical experiment tablefor a transmission electron microscope. The in-situ high-temperature quantitative mechanical experiment table comprises a sample rod body, a tilting table, a driving module and a micro-electromechanical system integrated testing device for acquiring the stress-strain information of a sample under temperature-stress coupling conditions; a linear stepping motor and a driving rod are arranged in thesample rod body, and the connecting part of the tilting table is rotatably connected with the sample rod body; the linear stepping motor is connected with the driving rod and is used for enabling thedriving rod to do reciprocating linear motion along the length direction of the sample rod body, so that the mounting part of the tilting table can rotate; and the driving module is arranged on the mounting part of the tilting table and is used for carrying out mechanical loading on a sample on the micro-electromechanical system integrated testing device. The in-situ high-temperature quantitativemechanical experiment table for the transmission electron microscope can realize quantitative high-temperature mechanical test on micro-nano scale samples, and obtains an optimal observation angle inreal time through double-shaft tilting.

Description

Technical field [0001] The embodiment of the present invention relates to the technical field of material in-situ micro-nano experimental mechanics, in particular to an in-situ high-temperature quantitative mechanics experiment platform for a transmission electron microscope. Background technique [0002] In recent years, in-situ high-temperature experimental mechanics devices integrated in transmission electron microscopes have made important progress. Representative products include Hysitron's PI 95 in-situ sample rod and Nanofactory's TEM-AFM commercial products. The three-dimensional displacement control module and the long axis structure of the mechanics sensor module are used as the main mechanics module. The probe fixed at the front end of the mechanics main module applies stress to the sample to be tested, and the heating chip mounted on the front end of the sample rod can realize the Force and heat are coupled, but the design of this type of mechanics module loses the Y-...

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Problems solved by technology

[0005] The purpose of the embodiments of the present invention is to provide a quantitative high-temperature mechanical test for micro-nano-scale samples, and obtain the best observation angle in real time through biaxial tilting, so as to obtain the evolution of the microstructure of the material under special observation conditions and The transmission electron microscope in-situ high-temperature quantitative mechanical test bench for chemical composition change information is used to solve the problem that the existing in-situ high-temperature quantitative mechanical test bench cannot simultaneously realize in-situ observation of biaxial tilting and quantitative testing of material mechanical information defect

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