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Method and device for detecting numerical aperture of objective lens

A technology of numerical aperture and detection device, applied in the field of optical detection, can solve problems such as many human factors

Active Publication Date: 2021-04-13
GEOPTICS SEQUENCING EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] Traditionally, the numerical aperture of microscope objective lens and photographic objective lens is usually detected by pinhole diaphragm method and numerical aperture meter method, both of which are not suitable for numerical aperture measurement of high numerical aperture objective lens, especially liquid immersion objective lens, Moreover, there are many human-influenced factors in the testing process.
With the advancement of lithography objective lens technology, the goal of detecting the numerical aperture of the objective lens has been developed by improving the wave aberration test technology of the objective lens. This technology has high measurement accuracy and a high degree of automation, which can reduce the influence of human factors on the measurement accuracy, but now The existing technology is to use the one-way wave aberration detection technology of the objective lens to detect the numerical aperture, which is only suitable for the numerical aperture detection of the finite conjugate dry objective lens

Method used

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  • Method and device for detecting numerical aperture of objective lens
  • Method and device for detecting numerical aperture of objective lens
  • Method and device for detecting numerical aperture of objective lens

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Embodiment 1

[0030] This embodiment provides a detection device for the numerical aperture of an objective lens. The detection device can be used to detect a dry objective lens and an immersion objective lens, and the detected objective lens is an infinite conjugate objective lens.

[0031] Such as figure 1 As shown, the detection device for the numerical aperture of the objective lens in this embodiment mainly includes a wave aberration detector 1 and a mirror 2 .

[0032] The wave aberration detector 1 may be any wave aberration detection device, such as a Fizeau interferometer or a Shack-Hartmann sensor based on two-beam interference. The wave aberration detector 1 has a transceiver end that emits and receives parallel measurement light, and measures wave aberration through interference between the emitted and returned measurement light.

[0033] One end of the reflector 2 is provided with a concave spherical reflective surface, which can be used to reflect the gathered measuring light...

Embodiment 2

[0040] This embodiment provides another detection device for the numerical aperture of the objective lens. This detection device adds a transmission spherical wave lens on the basis of the detection device in Embodiment 1 above. The detection device of the transmitted spherical wave lens is added, which can be used to measure the numerical aperture of the finite conjugate objective lens.

[0041] Such as figure 2 As shown, a transmission spherical wave lens 5 is attached to the transceiver end of the wave aberration detector 1, and the transmission spherical wave lens 5 converts the parallel measurement light emitted by the wave aberration detector 1 into divergent focused light and irradiates it to the measured object. on objective lens 3. Moreover, the f-number of the transmitting spherical wave lens 5 is less than or equal to the image-side f-number of the objective lens 3 under test, so that the measurement light transmitted by the transmitting spherical wave lens 5 can ...

Embodiment 3

[0044] This embodiment provides a method for detecting the numerical aperture of an objective lens. When detecting an infinite conjugate objective lens, the detection device in Embodiment 1 is used to realize it; when detecting a finite conjugate objective lens, the detection device in Embodiment 2 is used to realize it. This embodiment is described by taking the measurement of the numerical aperture of the limited conjugate objective lens as an example. The detection method of the present embodiment can detect the numerical aperture of any field of view of the objective lens 3 under test. The lower numerical apertures are different.

[0045] Such as image 3 As shown, the detection method of the present embodiment comprises the following steps:

[0046] S101: adjusting the confocal;

[0047] After the objective lens 3 under test is fixedly placed on the optical path between the wave aberration detector 1 and the mirror 2, the mirror 2 is adjusted to move along the optical ...

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Abstract

The invention discloses a detection method and device for the numerical aperture of an objective lens. The detection device includes a wave aberration detector and a reflection mirror. The wave aberration detector has a transceiver end for transmitting and receiving measurement light, and the reflection mirror has a wave aberration detector for transmitting and receiving measurement light. The concave spherical reflective surface that reflects the measurement light, the transceiver end of the wave aberration detector and the concave spherical reflective surface of the reflector are arranged opposite to each other, and there is a space for placing the measured objective lens between them; the reflector can be along the optical axis. Movement settings for moving to confocal and defocused positions with the objective under test to reflect the measurement light to the objective under test. Since the wave aberration detector can detect the wave aberration of the measured objective lens by transmitting and receiving the reflected double-pass measurement light, the detection device can detect the numerical aperture of the measured objective lens with higher precision through the double-pass wave aberration. , and is suitable for testing the numerical aperture of dry and immersion objectives.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a detection method and device for the numerical aperture of an objective lens. Background technique [0002] Traditionally, the numerical aperture of microscope objective lens and photographic objective lens is usually detected by pinhole diaphragm method and numerical aperture meter method, both of which are not suitable for numerical aperture measurement of high numerical aperture objective lens, especially liquid immersion objective lens, Moreover, there are many human influence factors in the testing process. With the advancement of lithography objective lens technology, the goal of detecting the numerical aperture of the objective lens has been developed by improving the wave aberration test technology of the objective lens. This technology has high measurement accuracy and a high degree of automation, which can reduce the influence of human factors on the measurem...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/12
CPCG01B11/12
Inventor 苗亮孙志远马铭泽马固爽
Owner GEOPTICS SEQUENCING EQUIP CO LTD