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In-situ failure analysis sample table and scanning electron microscope

A failure analysis sample and in-situ technology, which is applied to the analysis of materials, material analysis using wave/particle radiation, circuits, etc. The effect of destruction

Pending Publication Date: 2019-07-12
SHANDONG ANALYSIS & TEST CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] In order to solve the above problems, the first aspect of the present disclosure provides an in-situ failure analysis sample stage, which can realize the observation of the sample by flipping it over at will, solves the problem that the sample stage cannot be flipped and observed flexibly at any angle, and improves the efficiency of failure analysis. Efficiency, reducing the damage of external contact to failure parts, improving the service life of equipment

Method used

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  • In-situ failure analysis sample table and scanning electron microscope
  • In-situ failure analysis sample table and scanning electron microscope
  • In-situ failure analysis sample table and scanning electron microscope

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Experimental program
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Effect test

Embodiment approach

[0039] As an embodiment, the scanning electron microscope in-situ failure analysis sample stage further includes:

[0040] The supporting part is used for supporting the reversing part.

[0041] As an optional embodiment, the support part is formed by fixed connection of two support structures 4 with the same structure.

[0042] It can be understood that the support structure can be fixed by means of screw fixing or clamping, and those skilled in the art can specifically select a fixing connection method according to actual conditions.

[0043] Specifically, such as Figure 4 As shown, the support structure 4 includes a bottom 6 and a side wall 7, the bottom 6 is provided with a semicircular notch 8, the radius of the semicircular notch 8 is greater than the radius of the first bevel gear 1; the side wall 7 is fixed on the bottom , both end surfaces of the side wall 7 are provided with at least one groove 9 for supporting the second gear shaft 3 .

[0044] The radius of the...

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Abstract

The invention provides an in-situ failure analysis sample table and a scanning electron microscope. The in-situ failure analysis sample table comprises a reversing portion, a clamping portion and a driving portion, wherein the reversing portion includes a first bevel gear and a second bevel gear, and the first bevel gear is meshed with the second bevel gear; the first bevel gear is sleeved and fixed on a first gear shaft; the second bevel gear is sleeved and fixed on a second gear shaft; the clamping portion is installed on the end part of the second gear shaft and used for clamping a sample;and the driving portion is connected with the first gear shaft and used for driving the first bevel gear to rotate, driving the second bevel gear to rotate in-situ and thus driving the sample to rotate by 360 degrees around the second gear shaft so as to achieve in-situ failure analysis of the sample.

Description

technical field [0001] The disclosure belongs to the field of scanning electron microscope sample stages, in particular to an in-situ failure analysis sample stage and a scanning electron microscope. Background technique [0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art. [0003] Scanning Electron Microscope (SEM) is widely used in the inspection and research of metal materials and non-metal materials, and is a microscopic morphology observation method between transmission electron microscope and optical microscope. The scanning electron microscope scans the surface of the sample with a very fine electron beam, collects the generated secondary electrons with a special detector, forms an electrical signal and sends it to the picture tube, and displays the three-dimensional conformation of the object surface on the fluorescent screen. Scanning electron microscope can anal...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/20H01J37/28G01N23/2251G01N23/2204
CPCH01J37/20H01J37/28G01N23/2251G01N23/2204
Inventor 丁宁侯南刘珑田力男郭卫民李囡
Owner SHANDONG ANALYSIS & TEST CENT
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