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Processing method used after quartz boat cleaning

A processing method, quartz boat technology, applied in sustainable manufacturing/processing, electrical components, climate sustainability, etc., to reduce processing time, increase productivity, and achieve normal square resistance

Inactive Publication Date: 2019-07-26
JIANGSU GREEN POWER PV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem of using O after cleaning the quartz boat in the prior art 2 and POCL 3 The technical problem that quartz boat is carried out saturation treatment existence, the present invention provides a kind of not using O 2 and POCL 3 The processing method that carries out saturation treatment to quartz boat, to solve the problems existing in the above-mentioned background technology

Method used

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  • Processing method used after quartz boat cleaning

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0019] Step 1: Add a mixture of HF, HCL and water with a volume ratio of 4:1:30 into the quartz boat cleaning machine;

[0020] Step 2: Put the quartz boat into the quartz boat cleaning machine for bubbling and cleaning for 6 hours;

[0021] Step 3: dry the cleaned quartz boat with nitrogen;

[0022] Step 4: Put the dried quartz boat into the furnace tube and pass a steady flow of 25000SCCM N 2 , the temperature is stabilized to 900°C, and it runs for 20 minutes.

Embodiment 2

[0024] Step 1: Add a mixture of HF, HCL and water with a volume ratio of 4:1:30 into the quartz boat cleaning machine;

[0025] Step 2: Put the quartz boat into the quartz boat cleaning machine for bubbling and cleaning for 6 hours;

[0026] Step 3: dry the cleaned quartz boat with nitrogen;

[0027] Step 4: Put the dried quartz boat into the furnace tube and pass a steady flow of 10000SCCM N 2 , the temperature is stabilized to 950°C, and it runs for 30 minutes.

Embodiment 3

[0029] Step 1: Add a mixture of HF, HCL and water with a volume ratio of 4:1:30 into the quartz boat cleaning machine;

[0030] Step 2: Put the quartz boat into the quartz boat cleaning machine for bubbling and cleaning for 6 hours;

[0031] Step 3: dry the cleaned quartz boat with nitrogen;

[0032] Step 4: Put the dried quartz boat into the furnace tube and pass a steady flow of 30000SCCM N 2 , the temperature is stabilized to 800°C, and it runs for 10 minutes.

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PUM

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Abstract

The invention relates to the technical field of solar cell panel manufacturing, in particular to a processing method used after quartz boat cleaning. O2 and POCL3 are not used for processing the cleaned quartz boat, so that the diffusion production cost is saved, the processing time of the quartz boat is greatly shortened, and the productivity is improved; and the quartz boat processed by the method has no poor appearance and boat printing in the diffusion process, and shows normal square resistance; and compared with the previous saturation processing adopting POCL3, the cycle can be prolonged for 5-10 days.

Description

technical field [0001] The invention relates to the technical field of solar cell panel manufacturing, in particular to a treatment method for cleaning a quartz boat in the diffusion process in the production of crystalline silicon solar cells. Background technique [0002] After the quartz boat has been used for a period of time after the diffusion process, the position of the card slot is prone to dirt, resulting in poor appearance of the boat printing during the production process. Therefore, the quartz boat needs to be cleaned regularly, and then the quartz boat is saturated. There will be no abnormal appearance and square resistance of the silicon wafer. [0003] In the prior art, O is usually used after the quartz boat is cleaned. 2 and POCL 3 Carry out saturation treatment to it, fully absorb phosphorus atoms on the surface of the quartz boat, saturate the quartz boat, however, use O 2 and POCL 3 P will be generated during saturation 2 o 5 , P 2 o 5 It is easy...

Claims

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Application Information

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IPC IPC(8): H01L31/18
CPCH01L31/18Y02P70/50
Inventor 吴永秋
Owner JIANGSU GREEN POWER PV