Graphite base

Abstract

The invention discloses a graphite base, and belongs to the technical field of semiconductors. The graphite base is of a disc structure, multiple round grooves used for containing epitaxial wafers andat least one first annular groove are formed in the first round end face of the graphite base, at least one second annular groove is formed in the second round end face of the graphite base, the circle centers of all round grooves in the first round end face is located on at least two concentric circles, the circle centers of the at least two concentric circles, the circle center of at least onefirst annular groove and the circle center of the first round end face coincide, the circle center of at least one second annular groove coincides with the circle center of the second round end face,and the total volume of at least one second annular groove is larger than the total volume of at least one first annular groove. Stress generated by heat expansion of the same surface of the graphitebase can be evenly released, meanwhile, the stress difference generated by heat expansion of the two round end faces of the graphite base can be compensated for at the same time, the phenomenon that under the stress effect, the graphite base becomes the concave shape can be effectively avoided, and the uniformity of the epitaxial wafers formed by the graphite base can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a graphite base. Background technique [0002] Light Emitting Diode (English: Light Emitting Diode, referred to as: LED) is a semiconductor diode that can convert electrical energy into light energy. LED has the advantages of high efficiency, energy saving, and environmental protection, and is widely used in traffic indication, outdoor full-color display and other fields. In particular, the use of high-power LEDs to realize semiconductor solid-state lighting is expected to become a new generation of light sources and enter thousands of households, causing a revolution in the history of human lighting. [0003] When making LEDs, first epitaxially grow semiconductor crystal materials on the substrate to form LED epitaxial wafers; then set electrodes on the LED epitaxial wafers, and cut the LED epitaxial wafers to obtain at least two mutually independent LED chips; finally L...

AI Technical Summary

Problems solved by technology

[0008] The embodiment of the present invention provides a graphite base, which can solve the problem that the thermal expansion of the upper and lower surfaces of the graphite base is different in the prior art, resulting in inconsistent crystal quality of the LED epitaxial wafer formed on the edge and center of the graphite base.

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