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Telescopic type wheel transmission structure for PECVD reaction area

A transmission structure, telescopic technology, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of low transmission efficiency, complicated operation, affecting the utilization rate of the whole line equipment, etc.

Inactive Publication Date: 2019-08-02
BEIJING HUITIANNENG PHOTOELECTRIC TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the prior art, most of the transport used in PECVD is manipulator transport. Due to the complicated movement of the manipulator when sending and taking films, the transmission efficiency is low, which affects the utilization rate of the whole line equipment, and the cost of the manipulator is high.

Method used

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  • Telescopic type wheel transmission structure for PECVD reaction area
  • Telescopic type wheel transmission structure for PECVD reaction area
  • Telescopic type wheel transmission structure for PECVD reaction area

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Embodiment Construction

[0032] This application discloses a telescopic roller transmission structure for PECVD equipment. In PECVD equipment, the telescopic roller transmission structure is used for the transmission of workpieces to the reaction area. The linear feeding method of the roller transmission improves the transmission efficiency. The setting can be retracted after completion, avoiding the impact of the rollers on the PECVD reaction zone. Therefore, this kind of telescopic roller transmission structure effectively improves the efficiency of workpiece transmission in PECVD equipment, solves the problems of slow beat and complex structure of PECVD equipment, and improves the productivity of the entire equipment.

[0033] The telescopic roller transmission structure provided by the present application will be introduced and illustrated in detail below through specific embodiments.

[0034] figure 1 It is one of the internal structural diagrams of the telescopic roller transmission structure p...

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Abstract

A telescopic type wheel structure is adopted in the PECVD equipment reaction area for workpiece carrier plate transportation, and wheels rotate and transfer a workpiece; an ejector pin device ascendsand jacks the workpiece to disengage from the wheels; the wheels contract out of the reaction area; the ejector pin device descends, and the workpiece descends to a lower electrode; the coating technology is finished for the workpiece in the reaction area; the ejector pin device ascends and jacks the workpiece; the wheels stretch into the reaction area; the ejector pin device descends, and the workpiece falls onto the wheels; the wheels rotate and transfer the coated workpiece out; and the workpiece is transferred to a next PECVD cavity to be repeatedly subjected to the above process, the nextcoating procedure is conducted, and the workpiece can be efficiently linearly fed. Thus, by means of the above telescopic type wheel structure, reliable transmission of the workpiece can be guaranteed, the beat is accelerated, the equipment production efficiency is improved, and the urgent requirements of PECVD for efficiency improving and capacity increasing can be effectively met.

Description

technical field [0001] The invention relates to the technical field of vacuum transmission, and more specifically, the invention relates to a telescopic roller transmission structure for a PECVD reaction zone. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) refers to the plasma enhanced chemical vapor deposition method. The working principle is to use microwave or radio frequency to ionize the gas containing the atoms of the film components to form plasma locally, and the plasma is highly chemically active and easy to react, depositing the desired film on the substrate. [0003] The invention is used in PECVD production line equipment, and provides a scalable roller transmission structure for the coating process. By using the stretchable transmission structure described in the present invention, it can effectively meet the strict process environment requirements required for the production of heterojunction high-efficiency solar cells, fast p...

Claims

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Application Information

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IPC IPC(8): C23C16/458C23C16/50
CPCC23C16/458C23C16/50
Inventor 张迎春张源
Owner BEIJING HUITIANNENG PHOTOELECTRIC TECH
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