Double-axis translational self-sensing super-resolution imaging platform and methods

Abstract

The invention discloses a double-axis translational self-sensing super-resolution imaging platform and methods. The double-axis translational self-sensing super-resolution imaging platform comprises alight-passing top cover on the uppermost part, four driving piezoelectric stacks, a translational self-sensing part and a base with a support decoupling unit; an X-axis displacement sensing measurement unit and a Y-axis displacement sensing measurement unit each comprise a pair of flexible metal beams and platform displacement output units fixedly connected with the tail ends of the pair of flexible metal beams, wherein the flexible metal beams are located on four corners of a quadrangular platform and rigidly supported on the quadrangular platform in a mirror-image mode, and the diagonals ofthe flexible metal beams are 45 degrees; resistance strain gauges are attached to the upper surface and the lower surface near the root part of each flexible metal beam; four groups of two-stage amplification piezoelectric driving input units are perpendicularly arranged in a crossed manner, and the four groups of two-stage amplification piezoelectric driving input units, an X-axis displacement output unit, and a Y-axis displacement output unit are distributed in the shape like a Chinese character 'mi' on two diagonal lines of the quadrangular platform. According to the double-axis translational self-sensing super-resolution imaging platform, input and output units are separated, and a mechanism self-sensing function is achieved by constructing a cantilever beam structure; the input end displacement is subjected to two-stage amplification, and the driving units are arranged in a crossed manner along the diagonal lines, so that the effective stroke along the double-spindle directions is increased; the structure of the platform is more compact due to the distribution shape like the Chinese character 'mi'.

Description

technical field [0001] The invention relates to the technical field of piezoelectric precision imaging, in particular to a two-axis translation self-sensing super-resolution imaging platform, an actuation method and a micro-displacement sensing measurement method. Background technique [0002] With the rapid development of science and technology and the continuous improvement of aerospace application requirements in recent years, the space camera adjustment mechanism has become a key technology for high-precision imaging systems. Due to the limitation of the optical diffraction limit of the satellite platform lens itself and the interference of micro-vibration, the imaging blur and image quality degradation caused by the limit resolution seriously affect the image quality. For space cameras, taking measures to quickly and actively adjust the position of the camera pointing mechanism can increase the field of view of the camera, realize super-resolution imaging, and obtain va...

AI Technical Summary

Problems solved by technology

[0003] Although the existing piezoelectric two-axis translation stage is light in weight, fast in response and high in actuation precision, its application is limited due to the small aperture, the small linear displacement actuation stroke and the lack of an independent platform sensing unit. scope

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