Contact structure of self-holding MEMS relay

Abstract

The invention discloses a contact structure of a self-holding MEMS relay, and the contact structure comprises a first supporting beam, a second supporting beam, a first driving structure and a seconddriving structure, wherein the first driving structure and the second driving structure are used for respectively driving the first supporting beam and the second supporting beam to operate. The fixedends of the first supporting beam and the second supporting beam are fixed on the relay substrate, and the movable ends are respectively provided with a first contact and a second contact, wherein the polar moment of inertia of the first contact relative to the fixed end of the first support beam is greater than the polar moment of inertia of the second contact relative to the fixed end of the second support beam. According to the invention, the contact structure enables the device to realize the corresponding motion time sequence of the two contacts under the simple driving time sequence, thereby realizing the self-holding function, and achieving the beneficial effect of simplifying the structure of a driving circuit.

Description

technical field [0001] The invention belongs to the technical field of microelectromechanical system devices, in particular to a contact structure of a self-holding MEMS relay. Background technique [0002] Micro-Electro-Mechanical System (MEMS, Micro-Electro-Mechanical System), developed on the basis of microelectronics technology, integrates technologies such as lithography, corrosion, thin film, LIGA, silicon micromachining, non-silicon micromachining and precision machining fabricated electromechanical devices. For example, MEMS relay (micro-electromechanical system relay) is an electric switch realized by the above manufacturing technology. [0003] MEMS relays are divided according to the driving principle of the movable part, including piezoelectric, electromagnetic, thermoelectric and electrostatic drive. Among them, the driving mechanism of the electrostatic MEMS relay is to rely on the Coulomb force to drive the movement of the movable part, which can achieve low...

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Problems solved by technology

[0011] It can be seen from the above description that the function realization of the existing self-holding MEMS relay requires complex circuit timing support, which significantly increases the complexity of the driving circuit, which is not conducive to the actual application of the device

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