A large-travel, rotatable three-degree-of-freedom parallel flexible micro-motion platform

Abstract

The purpose of the present invention is to provide a large-stroke, rotatable three-degree-of-freedom parallel flexible micro-motion platform, which has a large stroke, a large area of ​​the loading platform, and a compact structure. The large-stroke, rotatable three-degree-of-freedom parallel flexible micro-motion platform includes a frame, a loading platform, an X-direction drive-amplification mechanism, an X-direction auxiliary mechanism, a Y-direction drive-amplification mechanism, and a Y-direction auxiliary mechanism. The first link mechanism in the Y direction and the first link mechanism in the Y direction are symmetrical about the angle bisector of the X axis and the Y axis, and the second link mechanism in the X direction and the second link mechanism in the Y direction are about the X axis and the Y axis The angle bisector is symmetrical, the first linkage mechanism in the X direction and the second linkage mechanism in the Y direction drive the loading platform to rotate around the Z axis; the second linkage mechanism in the X direction and the first linkage mechanism in the Y direction drive The loading platform rotates around the Z axis.

Description

technical field [0001] The invention relates to a large-stroke, rotatable three-degree-of-freedom parallel flexible micro-motion platform. Background technique [0002] The flexible piezoelectric micro-motion platform is a micro-displacement mechanism driven by a piezoelectric driver and transmitting displacement through a flexible structure. The flexible piezoelectric micro-motion platform has the advantages of no assembly, no transmission gap, no friction and wear, small displacement resolution (up to nanometer level), short response time (up to millisecond level), high rigidity, small size, strong bearing capacity, etc. Advantages, it is widely used in technical fields that require micro / nano positioning, such as precision processing and testing, optical fiber docking, micro-part assembly, and cell micro-manipulation. [0003] Chinese patent CN204897391U discloses a piezoelectric micro-motion platform based on flexible hinge amplification, using a double rocker mechanism...

AI Technical Summary

Problems solved by technology

However, the piezoelectric micro-motion platform has the following problems: 1. The driving force of the amplification mechanism to the output of the loading platform is limited

In addition, because the structure of the amplifying mechanism of the piezoelectric micro-motion platform is not compact enough, there is only one amplifying mechanism on one side of the loading platform. Driven by the platform, multiple amplification mechanisms will take up a large volume

2. The loading platform area is small

3. The patent only discloses that the piezoelectric micro-motion platform has two degrees of freedom (X axis, Y axis)

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