Ultra-high vacuum rotary feed-in device

Abstract

The invention provides a ultra-high vacuum rotary feed-in device, which is used for solving the technical problems that in the prior art, a rotary feed-in device is small in effective drift diameter,poor in bearing capacity and sealing performance, and seaming rings of the rotary feed-in device are easy to damage. The ultra-high vacuum rotary feed-in device comprises a motor, a motor support, a coupling, a fixing frame, a cross roller bearing, a worm, a worm wheel, an upper flange and a lower flange, wherein the fixing frame comprises a bearing outer ring cover plate, a worm support and a worm fixing part, the upper flange comprises an inner ring fixing end and an extension end, and the lower flange comprises an outer ring fixing end and a sealing end. According to the technical scheme, the worm and the worm wheel are used as a main transmission mechanism, so that the device is simple in structure; sealing rings are arranged on the inner side of the lower flange, thus being capable ofavoiding directly bearing pressure so as to prolong the service life of the sealing rings; with the cross roller bearing arranged, the shaking generated in the working process of the device is reduced, and the control precision of the device is improved; and the plurality of sealing rings and a differential extraction flange are arranged, and accordingly the device is applicable to an ultra-highvacuum cavity.

Description

technical field [0001] The invention relates to the field of ultra-high vacuum reaction devices, in particular to an ultra-high vacuum rotary feeding device. Background technique [0002] In the prior art, the rotary feed-in device mostly uses angular contact bearings, deep groove ball bearings or cross roller bearings with fixed threaded holes as supports; if angular contact bearings are used as supports, the device usually has a large outer diameter and an effective diameter Small, the device shakes a lot during use, has poor load-bearing capacity, is prone to powder contamination, and the sealing ring is squeezed, wears a lot, and has a short life; if a crossed roller bearing with a fixed threaded hole is used as a support, the overall structure of the device is too Huge, bulky, small effective diameter, poor device compatibility, and severely restricted use conditions; if deep groove ball bearings are used as the supporting structure, the device will have weak load-beari...

AI Technical Summary

Problems solved by technology

[0002] In the prior art, the rotary feed-in device mostly uses angular contact bearings, deep groove ball bearings or cross roller bearings with fixed threaded holes as supports; if angular contact bearings are used as supports, the device usually has a large outer diameter and an effective diameter Small, the device shakes a lot during use, has poor load-bearing capacity, is prone to powder contamination, and the sealing ring is squeezed, wears a lot, and has a short life; if a crossed roller bearing with a fixed threaded hole is used as a support, the overall structure of the device is too Huge, bulky, small effective diameter, poor device compatibility, and severely limited use conditions; if deep groove ball bearings are used as the supporting structure, the device will have weak load-bearing capacity, large shaking, serious wear of the sealing ring, and short service life.

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