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Intelligent pre-scan in scanning transmission charged particle microscopy

A charged particle microscope, charged particle beam technology, used in material analysis, circuits, discharge tubes, etc. using wave/particle radiation, which can solve problems such as suboptimal, high failure rate, etc.

Pending Publication Date: 2019-08-30
FEI CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Vitrification of thin samples (e.g. for study in a TEM) tends to be a rather complex and delicate procedure, with a relatively high failure rate: Typically, a relatively large area of ​​a given sample may be subject to one or more of the following Not optimal:

Method used

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  • Intelligent pre-scan in scanning transmission charged particle microscopy
  • Intelligent pre-scan in scanning transmission charged particle microscopy
  • Intelligent pre-scan in scanning transmission charged particle microscopy

Examples

Experimental program
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Embodiment 1

[0071] figure 1 (not to scale) is a highly schematic illustration of an embodiment of a Scanning Transmission Charged Particle Microscope (STCPM) M in which the invention can be practiced; more specifically, a STEM is shown (however, in the context of the are, for example, ion-based microscopes). In the figure, within a vacuum enclosure 2, an electron beam B generated by an electron source 4 propagates along an electro-optic axis B" and passes through an electro-optic illuminator 6, directing / focusing the electrons onto a selected portion of a sample S (e.g., it can be (locally) thinned / planarized). Also depicted is a deflector system 8 which can be used (among other things) to achieve a scanning motion of the beam B.

[0072] The sample S is held in a sample holder H that can be placed in multiple degrees of freedom by a positioning device / tabletop A that moves the cradle A' to the (removably) attached holder H in; for example, the sample holder H may comprise a finger tha...

Embodiment 2

[0105] image 3 An enlarged photographic plan view of a portion of vitrified sample S is shown. Figure 4 The diagrams in the corresponding image 3 A highly magnified section of the subject. In both figures, sample S includes what is commonly referred to as a "mesh" or "automesh". It usually comprises a circular ring of metal wire (for example containing Cu or Ni for example), the diameter of the ring is usually about 3 mm, and the diameter of the wire is usually about 20 to 100 μm. Attached within the loop are rectilinear wire sections 1 which are (in this case) arranged to form an orthogonal (planar) grid pattern, defining a matrix of (essentially square) holes (openings / array of holes / windows) 1a. A membrane 3 is stretched across the grid (and optionally secured to the wires 1 , for example using an adhesive or by fusion bonding). This membrane 3 may for example comprise a carbonaceous material, such as nylon or graphene, and typically has a thickness ranging from ab...

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Abstract

A method of imaging a specimen in a Scanning Transmission Charged Particle Microscope, comprising the following steps: providing the specimen on a specimen holder; providing a beam of charged particles that is directed from a source through an illuminator so as to irradiate the specimen; providing a segmented detector for detecting a flux of charged particles traversing the specimen; causing saidbeam to scan across a surface of the specimen, and combining signals from different segments of the detector so as to produce a vector output from the detector at each scan position, said vector output having components Dx, Dy along respective X, Y coordinate axes,specifically comprising: performing a relatively coarse pre-scan of the specimen, along a pre-scan trajectory; at selected positionsonsaid pre-scan trajectory, analyzing said components Dx, Dy and also a scalar intensity sensor value Ds; using said analysis of Dx, Dy and Ds to classify a specimen composition at each positioninto oneof a group of composition classes; for a selected composition class, performing a relatively fine scan at positionsassigned to that class.

Description

technical field [0001] The present invention relates to a method of imaging a sample in a scanning transmission charged particle microscope comprising the steps of: [0002] - provide the sample on the sample holder; [0003] - Provides a beam of charged particles directed from the source through the illuminator to illuminate the sample; [0004] - Segmented detectors are available for detecting the flux of charged particles through the sample; [0005] -Scan the beam over the surface of the sample and combine the signals from the different sections of the detector to produce a vector output from the detector at each scanning position with Components Dx, Dy. [0006] The invention also relates to a Scanning Transmission Charged Particle Microscope (STCPM) capable of carrying out such a method. Background technique [0007] Charged particle microscopy, particularly in the form of electron microscopy, is a well-known and increasingly important technique for imaging microsc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/22G01N23/2251G01N23/2254
CPCG01N23/22G01N23/2251G01N23/2254H01J37/302H01J37/304H01J2237/24465H01J2237/24495H01J2237/2802H01J2237/2804H01J37/222H01J37/244H01J37/28
Inventor E.M.弗兰肯I.拉吉克B.J.詹森
Owner FEI CO