Field effect transistor applied to high-sensitivity gas sensor
A field-effect transistor and gas sensor technology, which is applied in the field-effect transistor field of high-sensitivity gas sensors, can solve the problem that the application of chemical gate structures is rarely reported, and achieves the effects of high sensitivity, high stability and good stability.
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[0017] The present invention will be further described in detail below in conjunction with the examples.
[0018] Such as figure 1 As shown, the field effect transistor applied to the high-sensitivity gas sensor of the present invention includes a conductive channel, a source region, a drain region, a gate oxide layer, a source electrode, a drain electrode, and a gate; the conductive channel is composed of three layers of vertical Heterostructure composition, from bottom to top is WSe 2 , BN, BP; the upper and lower surfaces of the conductive channel are respectively provided with a gate oxide layer; the outer surface of the gate oxide layer is deposited with a metal electrode by an atomic deposition method as a gate.
[0019] Such as figure 2 Shown is a schematic diagram of a longitudinal cross-section of a conductive channel. The channel adopts a three-layer vertical heterogeneous structure composed of three materials, and the three materials are all two-dimensional struc...
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