Probe card online probe adjustment and maintenance system and method

Abstract

The invention discloses a probe card online probe adjustment and maintenance system and method. A probe card is used for a predetermined time. The probe card online probe adjustment and maintenance method comprises the steps that first image information is captured, wherein a first image capture unit captures the first image information of multiple probes of the probe card and provides the first image information for a control unit; second image information is captured, wherein a second image capture unit captures the second image information of the multiple probes and provides the second image information for the control unit; and deformation is found out, wherein the control unit finds out the deformation of each probe according to the first image information and the second image information.

Description

technical field [0001] The present invention relates to a probe card online needle adjustment maintenance system and its method, especially to an image capture unit that uses an image capture unit to capture the image information of the probe of the probe card in different axial directions, and then interprets the image information to obtain Find out the deflection of the probe in real time. Background technique [0002] The current probe measuring machine uses the probe of the probe card to contact the object under test, and then knows whether the object under test is abnormal through the conductivity fed back. However, after repeated measurements, when repeated errors occur on the same position, it is only at this time that the position status of the probe may be reflected as a problem. [0003] When there may be a problem with the position status of the probe, the staff will remove the probe card for position detection, which is time-consuming and labor-intensive. [00...

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Problems solved by technology

However, after repeated measurements, when repeated errors occur on the same position, it will only reflect that there may be a problem with the position status of the probe.

[0003] When there may be a problem with the position status of the probe, the staff will remove the probe card for position detection, which is time-consuming and labor-intensive

[0004] Since the probe measurement is to conduct electrical measurement after the probe touches the object under test, it is a destructive measurement. If there is a problem with the position of the probe and cannot be detected and prevented in time, continuing to measure the object under test in a destructive manner may cause serious problems. Make the wrong position of the probe stick to the wrong position, thus causing irreversible damage to the object under test

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