A method and device for extracting removal function of magnetorheological polishing

A technology of magnetorheological polishing and extraction method, which is applied in the direction of complex mathematical operations, etc., can solve the problems of difficulty in accurately extracting effective data of magnetorheological polishing removal function, reducing the accuracy of magnetorheological processing, etc. easy to achieve effect

Active Publication Date: 2022-03-15
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Problems solved by technology

[0005] In view of the above problems, the purpose of the present invention is to solve the problem that the traditional method is difficult to accurately extract the effective data of the removal function of magnetorheological polishing, thereby reducing the accuracy of magnetorheological processing

Method used

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  • A method and device for extracting removal function of magnetorheological polishing
  • A method and device for extracting removal function of magnetorheological polishing
  • A method and device for extracting removal function of magnetorheological polishing

Examples

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Embodiment 1

[0102] For example, the spot picking operation in this embodiment is performed on a domestic magnetorheological machine tool, and the spot picking substrate is made of fused silica, a circular substrate with a diameter of 50 mm and a thickness of 5 mm.

[0103] Specifically, as Image 6 As shown, the extraction of the magnetorheological removal function is performed by the following method steps.

[0104] 1. Select the spot-picking substrate element, the substrate surface is required to be flat, and a fused silica substrate with PV=0.5λ is selected for spot-picking. First, wipe the surface of the element clean, and use scissors to cut out the label paper with a side length of about 5mm , stick it on the edge of the substrate element;

[0105] 2. Use an interferometer to measure the surface shape of the substrate element, save the detection data, name it start, the initial PV of the substrate is 0.486λ, and the positioning marks are clearly visible, such as Figure 7 shown;

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Abstract

The invention discloses a method and device for extracting a magneto-rheological polishing removal function. The method includes: acquiring surface shape detection data of a substrate element before and after spot sampling; position marks are placed on the edge of the substrate element ; According to the surface shape detection data and the position mark of the substrate element before and after the spot picking, calculate the residual data; carry out median filter processing to the residual data; filter the residual data after processing , using an elliptic arc to approximate the contour of the removal function, and generating multiple removal functions containing the same parameter; performing data offset and averaging operations on the plurality of removal functions containing the same parameter, and extracting the removal function. The method can accurately extract the removal function of magnetorheological polishing, and improve the accuracy of removal function and the precision of magnetorheological processing.

Description

technical field [0001] The invention relates to the field of optical processing, in particular to a method and a device for extracting a removal function of magnetorheological polishing. Background technique [0002] Magnetorheological polishing technology is an emerging optical surface precision machining technology, which has many advantages such as no subsurface defects, easy to achieve precise numerical control control, high machining accuracy, and high polishing efficiency. Magnetorheological polishing technology is widely used in the polishing of large-diameter flat optical components, the molding of continuous phase plates (CPP), and the fine polishing of aspherical optical components. It is of great significance for the processing of high-precision optical components. [0003] The accuracy of the magnetorheological removal function is a key factor to achieve high-deterministic magnetorheological machining, which directly determines the machining accuracy of optical c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06F17/10B24B1/00
CPCG06F17/10B24B1/005
Inventor 唐才学温圣林张远航颜浩嵇保建王翔峰邓燕石琦凯张清华李昂
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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