Vacuum coating machine sealing ring film coating tool and film coating method

A vacuum coating machine and sealing ring technology, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of high cost and low processing efficiency of sealing rings, so as to increase the quantity and expand the processability Sealing ring size range, solve the effect of low processing efficiency

Active Publication Date: 2019-10-08
JIANGSU XCMG CONSTR MASCH RES INST LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The present invention designs two kinds of vacuum coating tooling for sealing rings, which are tooling a and tooling b, respectively, to achieve coating on the inner and outer surfaces of the sealing ring respectively, and can adjust the coating tooling to adapt to the coating process of sealing rings of different sizes. The processing of the sealing ring is several times higher than that of the existing technology, which solves the problem of low processing efficiency and high cost of the sealing ring due to the limitation of the size of the vacuum chamber

Method used

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  • Vacuum coating machine sealing ring film coating tool and film coating method
  • Vacuum coating machine sealing ring film coating tool and film coating method

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Embodiment 1

[0026] Such as figure 1 As shown, a sealing ring coating tool for a vacuum coating machine uses tooling a to coat the inner surface of the sealing ring. Tooling a includes a sealing ring hanging plate (upper hanging plate 2 and lower hanging plate 6), limit nuts, and screw rods 4 and the tightening nut, the limit nut includes the first limit nut 3 and the second limit nut 5, the tightening nut includes the first tightening nut 1 and the second tightening nut 7, and the screw rod 4 plays a role in connecting the hanging The function of the two hanging plates of the plate 2 and the lower hanging plate 6 is to cooperate with the limit nut and the tightening nut. Specifically, the outer circumferences of the upper hanging plate 2 and the lower hanging plate 6 are arranged with several protruding grooves. It is clamped and hung on the sealing ring, and the upper hanging plate 2 and the lower hanging plate 6 are connected together by the screw rod 4. The upper hanging plate 2 and th...

Embodiment 2

[0032] Such as figure 2As shown, a sealing ring coating tooling for a vacuum coating machine is used. Tooling b can be used to coat the outer surface of the sealing ring. It is composed of a support rod 8, a chassis 9 and a positioning nut 10. There are slideways 13 on the spokes 12, and the support rods 8 slide along the slideways 13 to adjust the relative position of the support rods 8. The support rods 8 are detachable. The rod 8 is not deformed due to the elastic effect of the sealing ring. The supporting rod 8 is used to support the sealing ring for clamping. Two studs 14 are installed at the lower end, which run through the slideway 13 and cooperate with the positioning nut 10 to fix the supporting rod 8 on the On the chassis 9; during processing, the tooling b rotates with the turntable of the vacuum chamber to ensure the uniformity of the coating.

[0033] A coating method for a sealing ring coating tooling for a vacuum coating machine, wherein the coating on the out...

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Abstract

The invention provides a vacuum coating machine sealing ring film coating tool and film coating method. Two kinds of sealing ring film coating special tools, namely, the tool a and the tool b are designed. The tool a and the tool b are used for implementing film coating on an inner circumferential surface and an outer circumferential surface of a sealing ring. According to the tool a, the distancebetween an upper hanging disk and a lower hanging disk is adjusted by adjusting two limiting nuts so as to clamp and hang different sizes of sealing rings. When the tool b is used for processing thesealing ring, the positions of supporting rods are adjusted according to the diameters of the sealing rings, the sealing rings are sleeved on the supporting rods one by one, and the supporting rods prop the sealing rings open. The longer the supporting rods are, the more the number of the sealing rings capable of being hung is. The relative positions of the supporting rods are adjusted through sliding rails to adapt to different sizes of sealing rings. Through the vacuum coating machine sealing ring film coating tool and film coating method provided by the invention, the tool can be adjusted to adapt to different sizes of sealing rings to conduct film coating. Compared with the prior art, the number of the sealing rings capable of being processed at a time is increased by several times ormore. The problems that the processing efficiency of sealing rings is low and the processing cost of the sealing rings is high due to size limitation of a vacuum chamber are solved.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to a sealing ring coating tool for a vacuum coating machine and a coating method. Background technique [0002] The diamond-like carbon film is an amorphous carbon film with high hardness and low friction coefficient, which can prevent the intrusion of impurities such as external gases and liquids, and form a wear-resistant protective layer, which can significantly enhance the wear resistance of seals. Using vacuum coating technology to deposit a diamond-like carbon film on the sealing ring, a sealing ring with low friction coefficient and strong impact resistance can be obtained, which greatly improves the service life of the sealing ring, thereby improving the reliability of the hydraulic system. [0003] The vacuum chamber is an important part of the vacuum coating machine, and the sealing ring deposits the diamond-like carbon film in the vacuum chamber. For a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/50C23C14/04C23C16/26C23C16/458C23C16/04
CPCC23C14/04C23C14/0605C23C14/505C23C16/04C23C16/26C23C16/4581
Inventor 蹤雪梅刘剑飞何冰刘威
Owner JIANGSU XCMG CONSTR MASCH RES INST LTD
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