Resistive memory and making method thereof

Abstract

A resistive memory includes a first electrode layer, a first transition metal oxide layer, a second transition metal oxide layer, and a second electrode layer, wherein the first electrode layer comprises tungsten (Tungsten, W); the first transition metal oxide (TMO) layer is located on the first electrode layer and comprises titanium (Titanium, Ti); the second transition metal oxide layer is located on the first transition metal oxide layer and comprises silicon (Silicon, Si); the second electrode layer is on the second transition metal oxide layer and does not include tungsten; and the firsttransition metal oxide layer has a greater dielectric constant than the second transition metal oxide layer.

Description

technical field [0001] The disclosure relates to a non-volatile memory (non-volatile memory, NVM) and a manufacturing method thereof. In particular, it relates to a resistive memory element (resistive memory) and a manufacturing method thereof. Background technique [0002] A non-volatile memory device has the characteristic that the information stored in the memory unit will not be lost when the power is removed. At present, the charge trap flash (CTF) memory device that uses a charge trap is more widely used. However, as the accumulation density of the memory device increases, the critical size and pitch of the device shrink, and the charge storage flash memory device faces its physical limit and cannot operate. [0003] Resistive memory elements, such as resistive random-access memory (ReRAM), apply a pulse voltage to the metal oxide film of the memory element to generate a resistance difference as an information storage state such as "0". and the interpretation basis ...

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Problems solved by technology

[0004] However, typical resistive memory elements usually have a higher forming voltage than the operating voltage, which is not conducive to low-voltage operation, and cannot provide a low-power solution for electronic devices that require low-voltage operation, such as the Internet of Things (Internet of Things, IoT), wearable devices or portable electronic devices, such as laptops, tablets, smart watches, mobile phones, etc., to increase battery life

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