C4F7N/CO2/O2 ternary mixed gas partial pressure gas distribution device, and gas distribution method thereof
A mixed gas and CO2 technology, applied in the direction of mixing methods, gas and gas/steam mixing, mixers, etc., can solve the problems of low gas distribution accuracy and slow gas distribution speed, so as to improve gas distribution efficiency and gas distribution speed , the effect of high precision preparation
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Embodiment 1
[0053] Such as figure 1 As shown, this embodiment discloses a C 4 f 7 N / CO 2 / O 2 Three-way mixed gas partial pressure gas distribution device, including C 4 f 7 N intake pipeline structure 1, CO 2 Intake pipeline structure 2, O 2 Intake pipeline structure 3, C 4 f 7 N / CO 2 / O 2 Three-way mixed gas partial pressure mixing pipeline structure 4, C 4 f 7 N / CO 2 / O 2 Ternary mixed gas output pipeline structure 5.
[0054] C 4 f 7 N intake pipeline structure 1, CO 2 Intake pipeline structure 2, O 2 The intake pipeline structure 3 is used to separate C 4 f 7 N.CO 2 , O 2 Sequentially sent to C 4 f 7 N / CO 2 / O 2 In the ternary mixed gas partial pressure mixing pipeline structure. C 4 f 7 N / CO 2 / O 2 The ternary mixed gas partial pressure mixing pipeline structure is used to input C 4 f 7 N.CO 2 , O 2 Carry out constant pressure and C after constant pressure 4 f 7 N.CO 2 , O 2 to mix, C 4 f 7 N / CO 2 / O 2 The ternary mixed gas output pipeline ...
Embodiment 2
[0059] Such as figure 2 As shown, due to the C of the present invention 4 f 7 N intake pipeline structure 1, CO 2 Intake pipeline structure 2, O 2 The intake pipeline structure 3 is all the same, and the present embodiment uses C 4 f 7 N intake pipeline structure 1 is the object, its structure and working principle are disclosed, CO 2 Intake pipeline structure 2, O2 Refer to this embodiment for the structure and working principle of the intake pipeline structure 3 .
[0060] C 4 f 7 The N intake pipeline structure 1 includes a pressure reducing valve 11 , a solenoid valve 12 and an intake pipeline 13 .
[0061] The air inlet of air intake pipe 13 is connected with C 4 f 7 N cylinder connection, C 4 f 7 N from C 4 f 7 The N steel cylinder is input in the intake pipe 13, and the gas outlet of the intake pipe 13 is connected with the C 4 f 7 N / CO 2 / O 2 The inlet end of the ternary mixed gas partial pressure mixing pipeline structure is connected. The decompre...
Embodiment 3
[0066] Such as figure 1 , 3 As shown, the C of this embodiment 4 f 7 N / CO 2 / O 2 The ternary mixed gas partial pressure mixing pipeline structure includes a gas pressure regulating pipeline structure 41 and a gas mixing pipeline structure 42 . The inlet end of the gas pressure regulating pipeline structure 41 is connected with C 4 f 7 Outlet end of N intake pipeline structure 1, CO 2 The outlet end of the intake pipeline structure 2, O 2 The gas outlet end of the intake pipeline structure 3 is connected to regulate the pressure of the gas input therein. The gas outlet end of the gas pressure regulating pipeline structure 41 communicates with the gas inlet end of the gas mixing pipeline structure 42 for mixing the gas after constant pressure.
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