A Multifunctional Holographic Interferometry System

A holographic interference and measurement system technology, applied in the field of optoelectronics, can solve the problem that holographic measuring instruments cannot perform reflection measurement and transmission measurement at the same time.

Active Publication Date: 2020-10-20
NORTHEASTERN UNIV LIAONING
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Problems solved by technology

[0005] The purpose of the present invention is to provide a multifunctional holographic interferometric measurement system to solve the problem that current holographic measuring instruments cannot perform reflective measurement and transmissive measurement at the same time. The entire optical path is compact in structure, convenient and efficient

Method used

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  • A Multifunctional Holographic Interferometry System
  • A Multifunctional Holographic Interferometry System
  • A Multifunctional Holographic Interferometry System

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Embodiment Construction

[0023] The functional holographic interferometry system of the present invention will be described below with reference to the accompanying drawings.

[0024] Such as figure 1 As shown, a multifunctional holographic interferometric measurement system of the present invention includes: a vibration reduction platform 1, a focusing device 2, an object loading platform 3, a measuring optical path module 4, a lower housing 5 and an upper housing 6, and a focusing device 2 and the loading platform 3 are arranged in the lower casing 5, the measurement optical path module is arranged in the upper casing 6, and the lower casing is fixed on the vibration-damping platform 1.

[0025] The damping platform 1 adopts a spring damping damping structure for the purpose of passive vibration damping; the focusing device 2 adopts a worm gear screw lifting structure for realizing the up and down movement of the measurement optical path module 4 in the upper housing 6 The loading platform 3 is use...

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Abstract

A multifunctional holographic interferometry system of the invention comprises a vibration absorbing platform, a focusing device, a carrier platform, a measurement optical path module, a lower shell and an upper shell. The focusing device and the carrier platform are arranged in the lower shell. The measurement optical path module is arranged in the upper shell. The lower shell is fixed on the vibration absorbing platform. The vibration absorbing platform adopts a spring damping structure to achieve the purpose of passive vibration absorbing. The focusing device adopts a worm gear screw lifting structure, and is used to realize the up-down movement of the measurement optical path module in the upper shell. The carrier platform is used to place a sample to be measured and realize the horizontal movement of the sample, and includes a bottom coarse adjustment part, a nano piezoelectric fine adjustment part and a leveling part arranged in turn from bottom to top. The measurement optical path module is used to realize reflection measurement and transmission measurement. The system can carry out reflection measurement and transmission measurement simultaneously, has a compact overall optical path structure, and is convenient and efficient.

Description

technical field [0001] The invention belongs to the field of optoelectronic technology, and relates to a multifunctional holographic interferometric measurement system. Background technique [0002] Holographic technology is a stereoscopic imaging technology based on the principle of light interference and diffraction. It records the complete three-dimensional information of the object by simultaneously obtaining the amplitude and phase information of the object light wave, so as to obtain the real shape of the object. The main process can be divided into two steps: holographic recording and holographic reconstruction. In the recording process, in order to obtain light waves with high coherence, a beam of laser light is divided into two beams with equal intensity by using a beam splitter, one of which irradiates the object to be measured to form diffracted light waves, we call this diffracted wave an object wave, and the other beam Without processing, it is called the refer...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 马树军陈林雅朱建忠周旭杨康方锐
Owner NORTHEASTERN UNIV LIAONING
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