A Multifunctional Holographic Interferometry System

Abstract

A multifunctional holographic interference measurement system of the present invention includes: a vibration reduction platform, a focusing device, a carrier platform, a measurement optical path module, a lower housing and an upper housing. The focusing device and the carrier platform are arranged in the lower housing. , the measurement optical path module is installed in the upper housing, and the lower housing is fixed on the vibration reduction platform. The vibration reduction platform adopts a spring damping vibration reduction structure to achieve passive vibration reduction. The focusing device adopts a worm gear screw lifting structure to realize the up and down movement of the measurement optical path module in the upper housing. The loading platform is used to place the sample to be tested and achieve horizontal movement of the sample, including: a bottom coarse adjustment part, a nano piezoelectric fine adjustment part and a leveling part arranged in sequence from bottom to top. The measurement optical path module is used to implement reflection measurement and transmission measurement. The system can perform reflection measurement and transmission measurement at the same time. The entire optical path is compact, convenient and efficient.

Description

technical field [0001] The invention belongs to the field of optoelectronic technology, and relates to a multifunctional holographic interferometric measurement system. Background technique [0002] Holographic technology is a stereoscopic imaging technology based on the principle of light interference and diffraction. It records the complete three-dimensional information of the object by simultaneously obtaining the amplitude and phase information of the object light wave, so as to obtain the real shape of the object. The main process can be divided into two steps: holographic recording and holographic reconstruction. In the recording process, in order to obtain light waves with high coherence, a beam of laser light is divided into two beams with equal intensity by using a beam splitter, one of which irradiates the object to be measured to form diffracted light waves, we call this diffracted wave an object wave, and the other beam Without processing, it is called the refer...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a multifunctional holographic interferometric measurement system to solve the problem that current holographic measuring instruments cannot perform reflective measurement and transmissive measurement at the same time. The entire optical path is compact in structure, convenient and efficient

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