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Cleaning device and substrate cleaning method

A technology for cleaning devices and substrates, applied in cleaning methods and appliances, cleaning methods using liquids, cleaning methods using tools, etc., can solve problems such as easy slipping of substrates, poor cleaning effect, etc., to solve liquid backflow and improve cleaning effect of effect

Active Publication Date: 2021-02-02
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The embodiments of the disclosure provide a cleaning device and a substrate cleaning method, which are used to solve the problems that the substrate is easy to slip and the cleaning effect is not good in the existing substrate cleaning device

Method used

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  • Cleaning device and substrate cleaning method
  • Cleaning device and substrate cleaning method
  • Cleaning device and substrate cleaning method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] The embodiment of the present disclosure provides a cleaning device, which is combined with figure 1 Describe in detail.

[0036] like figure 1 as shown, figure 1 A schematic structural diagram of a cleaning device 100 provided in an embodiment of the present disclosure. The cleaning device 100 includes a driving part 110 , a grabbing part 120 , a telescoping rod 130 and a cleaning part 140 .

[0037] Specifically, the driving part 110 includes a driving motor (not shown in the figure), a guide rail 111 and a plurality of sliders 112 arranged at intervals on the guide rail 111, and the driving motor drives the plurality of sliders 112 on the 111 runs on the guide rail.

[0038] In this embodiment, the guide rail 111 is an annular guide rail, and the drive mode of the driving part 110 is a synchronous belt drive. In some other embodiments, the driving mode of the driving part 110 is not limited to synchronous belt driving, and may also be chain driving or screw driv...

Embodiment 2

[0046] The present disclosure provides a cleaning device, combined with Figure 2 to Figure 3 Describe in detail.

[0047] like figure 2 and image 3 as shown, figure 2 It is a schematic top view structure diagram of the cleaning device 200 provided by the embodiment of the present disclosure, image 3 A schematic side view of the structure of the cleaning device 200 provided by the embodiment of the present disclosure, the cleaning device 200 includes a driving part 210, a gripping part 220, and a plurality of telescopic rods 230

[0048] The driving part 210 includes a driving motor (not shown), a guide rail and a plurality of sliders 213 arranged at intervals on the guide rail, and the guide rail includes a first guide rail 211 and a second guide rail 212 arranged in parallel. When the slider 213 runs, the speed of the slider 213 on the first guide rail 211 and the second guide rail 212 is the same, and the running direction is opposite. because image 3 It is a sid...

Embodiment 3

[0060] The embodiment of the present disclosure provides a cleaning device, which is combined with Figure 4 to Figure 5 Describe in detail.

[0061] like Figure 4 and Figure 5 as shown, Figure 4 A schematic top view of the cleaning device 300 provided in the disclosed embodiment, Figure 5 A schematic side view of the structure of the cleaning device 300 provided by the embodiment of the present disclosure. The cleaning device 300 includes a driving part 310, a grabbing part 320, a plurality of telescopic rods 330

[0062] The driving part 310 includes a driving motor (not shown), a guide rail and a plurality of sliders 313 arranged at intervals on the guide rail, and the guide rail includes a first guide rail 311 and a second guide rail 312 arranged in parallel, so The running speed of the slider 313 on the first guide rail 311 and the second guide rail 312 is the same, and the running direction is opposite.

[0063] In this embodiment, the guide rail is an annular ...

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Abstract

The disclosure provides a cleaning device and a substrate cleaning method. The cleaning device includes a driving part, a plurality of gripping parts, a plurality of telescopic rods and a cleaning part, the driving part includes a driving motor, a guide rail and a plurality of sliders arranged at intervals on the guide rail, and the gripping part is used for grabbing and placing To clean the substrate, one end of the telescopic rod is connected to one or more grasping parts, and the other end of the telescopic rod is connected to the slider. The telescopic rod is used to adjust the distance between the grasping part and the driving part. The cleaning part is set on The gripping part is away from the side of the driving part, so that the surface to be cleaned of the substrate faces the cleaning part, and the bottom-up cleaning of the substrate is realized. The cleaning liquid generated by the cleaning part drops due to the influence of gravity, so as to solve the cleaning problem. For the problem of device liquid backflow, the pollutants attached to the surface of the substrate to be cleaned will not cause secondary adhesion due to gravity, thereby improving the cleaning effect of the cleaning device for cleaning the substrate.

Description

technical field [0001] The invention relates to the technical field of display device manufacturing, in particular to a cleaning device and a substrate cleaning method. Background technique [0002] Glass substrate is a basic component of a display device and one of the key basic materials for the flat panel display industry. In the manufacturing process of display devices, the TFT process has a very high degree of cleanliness on the surface of the glass substrate, but there are often a lot of pollutants on the surface, including organic pollutants such as fingerprints and grease, and inorganic particles such as dust and glass shavings. Therefore, the foreign glass substrate must be cleaned before feeding before the process. [0003] Most of the current glass substrate cleaning devices are designed with rollers. The glass substrates are mounted on the rollers and transported forward with the rotation of the rollers. side for cleaning. However, because the glass substrate ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B08B1/02B08B1/04B08B3/02B08B13/00B08B11/04H01L21/67
CPCB08B1/002B08B1/02B08B1/04B08B3/022B08B11/04B08B13/00H01L21/67011H01L21/67023
Inventor 胡冲韦显旺
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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