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Method for Measuring Scanning Parameters of Scanning Mirrors

A technology of scanning parameters and measurement methods, applied in the field of scanning parameter measurement of scanning mirrors, can solve problems such as large volume and high price, and achieve the effects of reducing volume, saving costs, and accurate values.

Active Publication Date: 2021-04-13
HESAI TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But these specialized measuring instruments are usually bulky and expensive

Method used

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  • Method for Measuring Scanning Parameters of Scanning Mirrors
  • Method for Measuring Scanning Parameters of Scanning Mirrors
  • Method for Measuring Scanning Parameters of Scanning Mirrors

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Embodiment Construction

[0044] According to the analysis in the background art section, it can be known that the electromechanical performance of the scanning mirror will be affected by the environment. For this reason, it is necessary to monitor the electromechanical characteristics of the scanning mirror in real time, mainly to measure the amplitude (amplitude) and deflection angle (initial phase) of the scanning mirror.

[0045] In the prior art, special instruments such as a position sensor (psd) are usually used to measure the amplitude and deflection angle of the scanning mirror, but these special measuring instruments are usually bulky and expensive.

[0046] In the present invention, on the basis of obtaining the initial value of the scanning parameter in the manner of single-point measurement, based on the initial value of the scanning parameter, at least two detector units respectively obtain echo signals at the center position of the detector unit. For the corresponding scanning time, acco...

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Abstract

A scanning parameter measurement method for a scanning mirror, comprising: obtaining an initial value of a scanning parameter; wherein, the scanning parameter includes an initial phase and an amplitude; based on the initial value of the scanning parameter, respectively obtaining echo signals for at least two detector units The scanning moment corresponding to the central position of the detector unit, wherein the installation position of each detector unit is known; the scanning moment corresponding to the central position of the detector unit according to the echo signals of the at least two detector units , to calculate the exact value of the scan parameter. The invention can obtain accurate values ​​of the amplitude and initial phase of the scanning mirror without special measuring instruments such as position sensors, which is beneficial to reducing the volume of the measuring instruments and saving costs.

Description

technical field [0001] The invention relates to the technical field of optical elements, in particular to a method for measuring scanning parameters of a scanning mirror. Background technique [0002] As a traditional optical component, scanning mirror has important applications in the fields of optical imaging, projection display and barcode recognition. Due to the advantages of small size, light weight, low cost, and low power consumption, scanning mirrors have broad application prospects in the fields of optical communication, projection display, object recognition, data storage, and biomedicine. [0003] The electromechanical performance of scanning mirrors can be affected by the environment. Specifically, under the drive of a specific frequency signal, due to the interference of ambient temperature, humidity and surrounding electromagnetic signals, the electromechanical characteristics of the scanning mirror will change slightly, which affects the stability of the scan...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01M11/00G01B11/26
CPCG01B11/26G01M11/00
Inventor 陈杰向少卿
Owner HESAI TECH CO LTD