Intelligent control system for clean room

Abstract

The invention discloses an intelligent control system for a clean room. The intelligent control system comprises a data acquisition and analysis module, a cloud platform servicer side, a clean room intelligent control module, a data display module, a data storage module, a monitoring module, a PC control end and a mobile phone client side. An alarm module reminds people of an equipment problem, sothat people conveniently maintain the equipment; through an energy-saving module, the mobile phone client side emits an energy-saving signal and the cloud platform server side transmits the signal into the clean room control module; the clean room control module emits a signal to the energy-saving module, so that resources can be saved while a temperature detector, a humidity detector and a dustdetector are separately in an energy-saving state; a temperature data storage module, a humidity data storage module and a dust data storage module are used for storing data, so that the people conveniently manage the data; and the cloud platform server side is arranged for transmitting the signal into the mobile phone client side, so that information inside the clean room can be conveniently known at any time by people.

Description

technical field [0001] The invention relates to the technical field of clean rooms, in particular to an intelligent control system for clean rooms. Background technique [0002] The development of clean room is closely linked with modern industry and cutting-edge technology. Due to the environmental requirements of the precision machinery industry (such as gyroscopes, miniature bearings, etc.), the semiconductor industry (such as large-scale integrated circuit production), the development of clean room technology has been promoted. According to domestic statistics, the pass rate of MOS circuit dies produced in an environment without cleanliness requirements is only 10% to 15%, and 64% for memory is only 2%. At present, it is quite common to apply clean rooms in industries such as precision machinery, semiconductors, aerospace, and atomic energy. [0003] The existing clean room control system cannot be combined with a mobile phone, which is not conducive to people knowing ...

AI Technical Summary

Problems solved by technology

[0003] The existing clean room control system cannot be combined with a mobile phone, which is not conducive to people knowing the information inside the clean room at any time, and the information on the mobile phone cannot be stored separately, which is not conducive to people's search, keeping the temperature value, humidity value and The dust content is within a certain range, and the power consumption is relatively large

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