Surface shape detection system and detection method of high-reflectance concave axicon

Abstract

A surface shape detection system and detection method of a high-reflectance concave axicon is provided. The detection system comprises: a phase-shift interferometer, a planar standard lens, a workbench, and an adjusting bracket. A to-be-tested concave axicon is fixed on the adjusting bracket, and an axis of the concave axicon is parallel with an optical axis of the phase-shift interferometer, anda conical surface faces a light exiting direction of the phase-shift interferometer. The adjusting bracket is installed on the workbench. A surface shape graph of the to-be-tested concave axicon superimposed at two different radial positions is obtained through measurement by using positioning scanning movement of the workbench in an axis direction of the to-be-tested concave axicon, two times ofreflection of a measurement beam of the phase-shift interferometer on the conical surface of the to-be-tested concave axicon, and reflection of the planar standard lens, an annulus surface shape of the to-be-tested concave axicon in different radial positions is solved, and finally a surface shape of the to-be-tested concave axicon is obtained. The present invention has advantages of being simplein structure and strong in applicability, producing no damages to a measuring part, and the like.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a high-reflectivity concave axicon mirror surface shape detection system and method based on a phase-shifting interferometer. [0002] technical background [0003] The axicon is a rotationally symmetrical pyramid optical element, which is widely used in imaging optical systems, laser beam shaping, etc. due to its long focal depth and narrow lateral width. Reflective axicons can be used to generate non-diffracting Bessel beams, hollow cone beams, and atomic traps. At present, the measurement of the surface shape of the reflective axicon mirror is mainly carried out by interferometer and CGH or contact measurement. For the high reflectivity axicon mirror, it is also necessary to add some optical components such as attenuation sheets to the interferometric measurement system. Therefore, the optical processing of high-reflectivity axicon mirrors is also limited by the accurate detec...

AI Technical Summary

Problems solved by technology

This method has gone through different test areas of the axicon lens during the test process, and the measurement results can only be used to evaluate the surface quality of the axicon lens, and no specific surface shape data can be obtained

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