Surface shape detection system and detection method of high-reflectance concave axicon

A high-reflectivity, surface shape detection technology, applied in the field of optical detection, can solve the problem of not getting surface shape data, etc., and achieve the effect of fast measurement, simple system and low measurement cost

Active Publication Date: 2019-11-12
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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This method has gone through different test areas of the axicon lens during the test process, and the measurement result

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  • Surface shape detection system and detection method of high-reflectance concave axicon
  • Surface shape detection system and detection method of high-reflectance concave axicon
  • Surface shape detection system and detection method of high-reflectance concave axicon

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[0029] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.

[0030] see first figure 1 , figure 1 It is a schematic diagram of the surface shape detection structure of the high reflectivity concave axicon of the present invention, as can be seen from the figure, the surface shape detection system of the high reflectivity concave axicon of the present invention comprises: phase-shifting interferometer 1, plane standard mirror 2, Workbench 3, adjustment frame 4, concave axicon 5 to be tested. The concave axicon 5 to be tested is fixed on the adjustment frame 4 , and the adjustment frame 4 is installed on the workbench 3 . The axis of the concave-axis conical mirror 5 to be tested is parallel to the optical axis direction of the phase-shifting interferometer 1 and the conical surface faces the light-emitting direction of the phase-shi...

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Abstract

A surface shape detection system and detection method of a high-reflectance concave axicon is provided. The detection system comprises: a phase-shift interferometer, a planar standard lens, a workbench, and an adjusting bracket. A to-be-tested concave axicon is fixed on the adjusting bracket, and an axis of the concave axicon is parallel with an optical axis of the phase-shift interferometer, anda conical surface faces a light exiting direction of the phase-shift interferometer. The adjusting bracket is installed on the workbench. A surface shape graph of the to-be-tested concave axicon superimposed at two different radial positions is obtained through measurement by using positioning scanning movement of the workbench in an axis direction of the to-be-tested concave axicon, two times ofreflection of a measurement beam of the phase-shift interferometer on the conical surface of the to-be-tested concave axicon, and reflection of the planar standard lens, an annulus surface shape of the to-be-tested concave axicon in different radial positions is solved, and finally a surface shape of the to-be-tested concave axicon is obtained. The present invention has advantages of being simplein structure and strong in applicability, producing no damages to a measuring part, and the like.

Description

technical field [0001] The invention relates to the field of optical detection, in particular to a high-reflectivity concave axicon mirror surface shape detection system and method based on a phase-shifting interferometer. [0002] technical background [0003] The axicon is a rotationally symmetrical pyramid optical element, which is widely used in imaging optical systems, laser beam shaping, etc. due to its long focal depth and narrow lateral width. Reflective axicons can be used to generate non-diffracting Bessel beams, hollow cone beams, and atomic traps. At present, the measurement of the surface shape of the reflective axicon mirror is mainly carried out by interferometer and CGH or contact measurement. For the high reflectivity axicon mirror, it is also necessary to add some optical components such as attenuation sheets to the interferometric measurement system. Therefore, the optical processing of high-reflectivity axicon mirrors is also limited by the accurate detec...

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Application Information

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IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02001G01B11/2441
Inventor 曾爱军魏张帆袁乔黄惠杰
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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