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Atomic force probe type sensor based on quartz ring resonator

A ring resonator, atomic force technology, applied in scanning probe technology, scanning probe microscopy, instruments, etc., can solve the problems of measurement accuracy and stability, and achieve strong stability and anti-interference ability. , high resolution, high development prospects

Active Publication Date: 2019-11-12
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Ambient temperature and humidity will cause changes in the dielectric constant of the medium or the geometric dimensions and relative positions of the plates, thus affecting its stability
At the same time, the existence of parasitic capacitance has a great influence on the measurement accuracy

Method used

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  • Atomic force probe type sensor based on quartz ring resonator
  • Atomic force probe type sensor based on quartz ring resonator
  • Atomic force probe type sensor based on quartz ring resonator

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Such as Figure 1-3 As shown, an atomic force probe sensor based on a quartz ring resonator in this embodiment is provided with a pressure film 8, a probe 14, a quartz ring resonator 7, a piezoelectric ceramic driver 3, and a control device along the vertical direction. System 15;

[0025] A probe 14 is connected directly below the quartz ring resonator 7, a pressure film 8 is arranged directly below the probe 14, and an electrode 6 is arranged on the horizontal diameter direction of the quartz ring resonator 7, and the electrode 6 6 specifically includes the first electrode 601 and the fourth electrode 604 connected to each other on the surface of the outer ring, and the second electrode 602 and the third electrode 603 connected to each other on the surface of the inner ring; the control system 15 includes at least a control circuit 16, an excitation Circuit 17 and drive circuit 19, the control circuit 16 is used to control the excitation circuit 17, and the drive cir...

Embodiment 2

[0031] This embodiment is basically the same as Embodiment 1, the main difference is that it also includes a housing 20 with a built-in cavity and a matching base 20, the base 20 is bonded to the lower part of the housing 20, and the middle part of the base 20 A through hole is provided, and a positioning groove is arranged around the upper end of the through hole. The pressure chamber 11 is installed in the through hole and matched with it. The pressure chamber 11 and the pressure membrane 8 are adhered in the positioning groove by silica gel. The lower part in contact with the base is tightly installed with the flange 9 and the through hole of the external thread; the control system 15 is installed on the inner wall of the casing 20, and the input port 18 is connected with the control system 15 and installed on the outer wall of the casing 20; The upper end of the housing 20 is provided with a through hole that matches the pre-tensioning device 4, and the pre-tensioning devic...

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PUM

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Abstract

The invention discloses an atomic force probe type sensor based on a quartz ring resonator, wherein a probe is connected directly below the quartz ring resonator, a pressure film is arranged directlyunder the probe, electrodes are disposed in the horizontal diameter direction of the quartz ring resonator and comprises a first electrode and a fourth electrode that communicate with each other on the surface of the outer ring, and a second electrode and a third electrode that communicate with each other on the surface of the inner ring; a control circuit is configured to control an excitation circuit and a driving circuit to output control signals, and the excitation circuit is connected to the first electrode and fourth electrode and the second electrode and third electrode respectively through leads; the output end of a piezoelectric ceramic driver is connected to the center of the top of the quartz ring resonator, and the piezoelectric ceramic driver and the probe are mounted symmetrically with respect to the center of the quartz ring resonator; the driving end of the piezoelectric ceramic driver is connected to the driving circuit through a lead. The atomic force probe type sensor based on the quartz ring resonator provided by the invention utilizes atomic force to detect surface deformation of a pressure film and has a nanometer resolution.

Description

technical field [0001] The invention relates to a pressure sensor for measuring weak pressure, in particular to an atomic force probe sensor based on a quartz ring resonator. Background technique [0002] Pressure sensor is a common sensor in people's daily life and industrial practice. A pressure sensor is a device that converts the measured pressure (not electricity) into an electrical signal. Common pressure sensors currently on the market include resistance strain pressure sensors, piezoresistive pressure sensors, and capacitive pressure sensors. [0003] The resistance strain type pressure sensor measures the pressure by changing the resistance value of the resistance strain gauge by the pressure change. In addition, due to the self-heating of the resistance, zero point drift will occur. The piezoresistive pressure sensor is composed of the piezoresistive effect of single crystal silicon. It needs to diffuse a group of equivalent resistance in a specific direction of ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/38
CPCG01Q60/38
Inventor 程荣俊戚玉海黄强先张连生李瑞君
Owner HEFEI UNIV OF TECH