Mask plate and manufacturing method thereof, manufacturing method of oled display substrate
A manufacturing method and a technology of a mask plate, which are applied in semiconductor/solid-state device manufacturing, vacuum evaporation plating, coating, etc., can solve problems such as the formation of evaporation shadows, and achieve the effects of reducing area and avoiding cross-contamination
Active Publication Date: 2021-09-21
BOE TECH GRP CO LTD +1
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Problems solved by technology
[0004] Embodiments of the present invention provide a mask plate and its manufacturing method, and a manufacturing method of an OLED display substrate, which are used to solve the problem of forming a gap between the mask plate and the display substrate in the existing organic light-emitting material evaporation process. shadowing problem
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Embodiment Construction
[0039] Please refer to figure 1 , figure 1 It is a schematic diagram of a method for manufacturing an OLED display substrate in the related art, figure 1 In this method, the organic light-emitting layer is formed by vapor deposition on the OLED display substrate 20 using the mask 10, the mask 10 includes a mask body 11 and evaporation holes 12 opened on the mask body 11, and the OLED display substrate includes: The base substrate 21 and the pixel definition layer 22 , the anode 23 and the support pattern 24 disposed on the base substrate 21 , when the support pattern 24 causes a certain gap between the mask plate 10 and the anode 23 to always be maintained. During the evaporation process, since the evaporation angle is not 90°, the evaporated organic luminescent material will penetrate through the gap to areas other than the evaporation hole 12, forming a large evaporation shadow on the OLED display substrate. ). This vapor deposition shadow will cause cross-contamination b...
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The invention provides a mask plate and its manufacturing method, and a method of manufacturing an OLED display substrate. The mask plate includes: a mask plate body, and a plurality of evaporation holes are opened on the mask plate body; a plurality of barrier rings , arranged on the mask body, corresponding to the plurality of evaporation holes one by one, and surrounded by the corresponding evaporation holes. When the mask plate of the present invention is used to vapor-deposit organic light-emitting materials on the substrate to be evaporated, during the evaporation process, the organic light-emitting materials passing through the evaporation holes will be blocked by the barrier ring, reducing or preventing the organic light-emitting materials from evaporating. Areas other than the areas facing the plated holes are diffused, reducing the area of evaporation shadows, thereby avoiding cross-contamination of adjacent organic light-emitting layers of different colors.
Description
technical field [0001] Embodiments of the present invention relate to the field of display technology, and in particular to a mask plate and a manufacturing method thereof, and a manufacturing method of an OLED display substrate. Background technique [0002] In the organic light-emitting diode (OLED) manufacturing process, the high-definition metal mask (FMM) can effectively ensure that red, green, blue (R, G, B) organic light-emitting materials are evaporated to the anode surface of the OLED display substrate, Avoid sub-pixel color mixing and thus gain wide adoption. A support pattern (PS) for supporting the FMM is provided on the anode of the OLED display substrate, and the support pattern causes a certain gap to be always maintained between the FMM and the anode. During the evaporation process, since the evaporation angle is not 90°, the evaporated organic light-emitting material will penetrate into the area other than the evaporation hole on the FMM through the gap, fo...
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IPC IPC(8): C23C14/04C23C14/12C23C14/24H01L51/00H01L51/56
CPCC23C14/042C23C14/12C23C14/24H10K71/166H10K71/00
Inventor 金熙哲陈腾孟维欣
Owner BOE TECH GRP CO LTD