Source bottle used for thin film deposition equipment and semiconductor equipment
A thin film deposition and source bottle technology, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve problems such as solid source condensation, and achieve simplified sealing design, improved space utilization, and uniform temperature distribution Effect
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[0055] Example
[0056] figure 2 with image 3 Respectively showing a longitudinal cross-sectional view and a transverse cross-sectional view of a source bottle for a thin film deposition apparatus according to an exemplary embodiment of the present invention, Figure 4 Showing a partial longitudinal sectional view of a source bottle for a thin film deposition apparatus according to an exemplary embodiment of the present invention, Figure 5 A longitudinal cross-sectional view showing a carrier of a source bottle for a thin film deposition apparatus according to an exemplary embodiment of the present invention.
[0057] Such as Figure 2-5 As shown, a source bottle for a thin film deposition apparatus according to an exemplary embodiment includes a source bottle body 8, an inner rotating part arranged in the source bottle body 8 and connected, and a carrier 11 for carrying a solid source 10, a device The outer rotating member outside the source bottle body 8 and the driving motor...
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