Control method of rotating motor

Abstract

The invention discloses a control method of a rotating motor, which is used for controlling the rotating motor in a machine table rotating device of semiconductor equipment. The control method of a rotating motor comprises the following steps of: a speed setting step of setting a target rotating speed before executing a process menu, and determining whether the speed setting is successful or not by acquiring the rotating speed fed back by the rotating motor in real time; a rotating speed maintaining step for maintaining the rotating speed of the rotating motor in the process of executing the process menu; and a step of reducing the speed and returning to the original point, namely reducing the speed of the rotating motor and returning to the original point after the process menu is executed, and determining whether the rotating motor returns to the original point successfully by acquiring the state fed back by the rotating motor in real time and detecting whether the rotating motor islocated at the original point position or not. In the speed setting step before the process menu is started and the speed reduction original point returning step after the process menu is ended, closed-loop control is adopted for the rotating motor, it is ensured that a control command of the rotating motor is successfully executed, and control over the rotating motor is safer, more reliable and more stable.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, in particular to a control method for a rotating electrical machine. Background technique [0002] Semiconductor equipment for silicon epitaxy generally includes a process chamber 1, a heating device 2, a tray 3, an exhaust device 4, an air intake device 5, and a rotary lifting device 6, specifically as figure 1 shown. Among them, the rotating lifting device 6 drives the tray 3 to rotate and lift, cooperates with the manipulator to pick and place the sheet, and realizes that the tray 3 maintains a certain rotation during the process, which has an important impact on the process performance and is an important part of the semiconductor equipment. [0003] The rotary lifting device 6 usually includes a rotary motor and a lifting cylinder structure. For stable process performance, it is necessary to maintain the rotating motor at a stable speed and the lifting structure at a stable height du...

AI Technical Summary

Problems solved by technology

[0008] 1. The rotation control part of the rotating motor adopts open-loop control, which is only responsible for issuing commands, and does not guarantee the execution results of the commands, including the success of the speed setting of the rotating motor after sending the speed in the speed setting step. Return to the origin step After the command is issued, it cannot be guaranteed that the rotating motor will eventually stay at the origin position;

[0009] 2. In the emergency stop step, if the current speed is high, the inertia will cause wear to the connecting device, reduce the service life of the device, and even cause the tray to directly deviate from the fixed position, causing greater damage;

[0010] 3. During the execution of the process menu, the rotating motor may cause an emergency stop due to an abnormality of the machine or itself, but the process will continue, the actual rotating motor does not rotate, and there is no alarm to remind the user, resulting in the wafer involved in subsequent work becoming waste directly affect the normal use of the machine, process debugging and normal mass production of the machine

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