Processing method of a micro-cantilever probe for ultralow friction coefficient measurement

Abstract

The invention relates to the technical field of atomic force electron microscope probes, and provides a processing method of a micro-cantilever probe for ultralow friction coefficient measurement. Themethod comprises the following steps: 1) establishing a micro-cantilever probe friction coefficient measuring model; according to the measurement principle of an atomic force microscope, establishingexpressions for measuring friction force and positive pressure through torsion and bending of the probe; and establishing the probe friction coefficient measuring model through the simultaneous expressions; 2) determining size parameters, including length l, width w and thickness t and the like, of the micro-cantilever probe according to the model; and 3) processing the probe. By establishing themicro-cantilever probe friction coefficient measuring model and determining the size parameters of the micro-cantilever probe according to the model, the probe is processed and manufactured. According to the invention, the micro-cantilever probe friction coefficient measuring model is established, and processing and manufacturing of the probe are realized by utilizing a high-precision optical imaging system and a high-precision motion control system of an existing atomic force microscope.

Description

technical field [0001] The invention belongs to the technical field of atomic force electron microscope probes, in particular to a processing method of a micro-cantilever beam probe for ultra-low friction coefficient measurement. Background technique [0002] Atomic force microscopy (AFM) has been widely used in many scientific fields and industrial fields such as semiconductors and integrated circuits. [0003] In particular, with the development of micro-nano science and technology, especially atomic force microscopy, atomic force microscopy plays an increasingly important role in the observation and imaging of microstructures, the characterization of microstructures, and the detection of photothermal, electroacoustic and other physical and chemical properties of the tested samples. more important impact. [0004] One of the key components for AFM to achieve high-resolution detection is the probe. During the test, the probe tip contacts the surface of the sample, and an ...

AI Technical Summary

Problems solved by technology

However, the surface of the existing AFM probe in contact with the tested sample is non-planar, and the actual value and the nominal value of the radius of curvature of the contacted surface will deviate, resulting in the inability to accurately detect various nature, which severely limits the development of atomic force microscopy

[0005] In summary, there are obviously inconveniences and defects in the actual use of the existing technology, so it is necessary to improve

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