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Double-door horizontal-structure optical mirror vacuum numerical control additive equipment

An optical mirror surface, two-door horizontal technology, applied in vacuum evaporation coating, metal material coating process, ion implantation coating and other directions, to achieve the effect of strong practicability, easy automatic control, and low requirements for manual operation

Pending Publication Date: 2019-12-20
南京爱思菲瑞克光电科技有限公司
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  • Claims
  • Application Information

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Problems solved by technology

These two structural designs are prone to various problems caused by pollutants during the additive process

Method used

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  • Double-door horizontal-structure optical mirror vacuum numerical control additive equipment
  • Double-door horizontal-structure optical mirror vacuum numerical control additive equipment

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Embodiment Construction

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0019] Both the pre-sputtering system 51 and the reverse sputtering system 52 belong to the prior art and are common knowledge.

[0020] see Figure 1-2 , the present invention provides a technical solution: double-door horizontal structural optical mirror vacuum numerical control additive equipment, including a vacuum studio 4, a magnetron sputtering cathode system 5 that moves three-dimensionally in the vacuum studio 4, and a vacuum studio 4 It adopts a hor...

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Abstract

The invention discloses double-door horizontal-structure optical mirror vacuum numerical control additive equipment comprising a vacuum work chamber. A magnetron sputtering cathode is arranged in thevacuum work chamber and can move on three dimensions The vacuum work chamber is of a horizontal structure. Double doors are arranged on the sides of the vacuum work chamber. The door on one side is used for installation and maintenance of a three-dimensional movement mechanism. The door on the other side is provided with a mirror moving device. The optical elements of the system are vertically arranged, so that the situation that dust falls onto the optical mirror in the optical mirror vacuum additive manufacturing process and influences the manufacturing quality can be avoided, and meanwhilethe sparking and discharging problems caused by when dust is accumulated on the magnetron sputtering cathode can be avoided.

Description

technical field [0001] The invention relates to an optical mirror surface additive technology, in particular to an optical mirror surface additive equipment with a double-door horizontal structure. Background technique [0002] The vacuum additive process for optical mirrors is a new technology to ensure that materials with different physical properties such as aluminum, beryllium, carbon fiber, and silicon carbide can be used for optical mirrors. The required environment, but the material itself is not suitable for direct polishing. It is necessary to grow a thin film suitable for optical polishing on its surface. This process is the optical mirror surface additive technology. The vacuum additive method of optical mirror can ensure the purity and physical properties of the growth material to the greatest extent, so as to have the best polishing effect. [0003] Due to the relatively complicated vacuum mirror surface additive technology and relatively high cost, there are r...

Claims

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Application Information

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IPC IPC(8): C23C14/35
CPCC23C14/35
Inventor 王晋峰
Owner 南京爱思菲瑞克光电科技有限公司