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Basket device for silicon wafer cleaning and drying

A silicon wafer cleaning and flower basket technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of rapid drying, small water and airflow, and long drying time, achieve thorough cleaning and increase water flow , the effect of reducing costs

Pending Publication Date: 2019-12-24
SHANGHAI FUCHUAN AUTOMATION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing silicon wafers are placed in flower baskets for cleaning and drying. The water flow and air flow in the circulation flower baskets are relatively small, and it is impossible to thoroughly clean and quickly dry silicon wafers, resulting in poor cleaning effect of silicon wafers and excessive drying time. long question

Method used

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  • Basket device for silicon wafer cleaning and drying
  • Basket device for silicon wafer cleaning and drying
  • Basket device for silicon wafer cleaning and drying

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] see Figure 1~4 , in an embodiment of the present invention, a flower basket device for cleaning and drying silicon wafers, comprising a flower basket body 10, a right side plate 1 is arranged on the right side of the flower basket body 10, a left side plate 2 is arranged on the left side of the flower basket body 10, a right side plate 2 is arranged on the right side of the flower basket body 10, The side plate 1 and the left side plate 2 are placed in parallel and on a straight line, and the front and rear sides of the flower basket body 10 are provided with a plurality of toothed stop rods 3, and the left and right ends of the toothed stop rods 3 are respectively fixedly connected to the left side plate 2 And on the side wall of the right side plate 1, there is a certain distance between the toothed stop rods 3 on the same side before and after. A plurality of evenly arranged racks 5, silicon chips 6 are installed between the racks 5, the basket body 1 is provided wi...

Embodiment 2

[0027] In order to further increase the cleaning efficiency of the silicon wafer 6, this embodiment is further improved on the basis of Embodiment 1. The improvement is: multiple nozzles 21 are arranged in the water tank 11, and the nozzles 21 can spray water columns to increase the impact on silicon wafers. The cleaning strength of sheet 6 makes it more thoroughly cleaned.

[0028] The working principle of this embodiment is: in order to further increase the cleaning efficiency of the silicon wafer 6, a plurality of nozzles 21 are arranged in the water tank 11, and the nozzles 21 can spray water jets to flush the flower basket body 10 in all directions, increasing the amount of water passing through the flower basket body 10. The water flow makes the silicon wafer 6 be cleaned more thoroughly.

[0029] To sum up, by setting the toothed stop rod 3, the water flow and air flow in the circulation flower basket body 10 can be increased, so that the silicon wafer 6 can be thorough...

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PUM

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Abstract

The invention discloses a basket device for silicon wafer cleaning and drying. The device comprises a basket body; a right side plate is arranged on the right side of the basket body; a left side plate is arranged on the left of the basket body; a plurality of toothed stop levers are arranged on the front side and the rear side of the basket body; a certain distance is reserved between the toothedstop levers on the same front and rear sides; stop levers which are arranged in parallel up and down are arranged on the toothed stop levers; a plurality of uniformly arranged racks are arranged between the stop levers; silicon wafers are installed between the racks; a bottom rod is arranged on the basket body; the two ends of the bottom rod are fixedly connected to the side wall of the left sideplate and the side wall of the right side plate respectively; the bottom rod is located below the silicon wafer; a bottom side rod is further arranged on the basket body; the two ends of the bottom side rod are fixedly connected to the side wall of the left side plate and the side wall of the right side plate respectively; and fixing heads are arranged on the outer side walls of the left side plate and the right side plate. By arranging the toothed stop levers, the water flow and the air flow circulating in the basket body can be increased, so that the silicon wafers are thoroughly cleaned and quickly dried.

Description

technical field [0001] The invention relates to the field of photovoltaic equipment, in particular to a flower basket device for cleaning and drying silicon wafers. Background technique [0002] With the depletion of traditional energy sources and serious pollution problems, new energy technologies such as solar energy have been developed by leaps and bounds. Silicon wafer is an important component of photovoltaic panels, and its production process requires cleaning and drying steps. [0003] The existing silicon wafers are placed in flower baskets for cleaning and drying. The water flow and air flow in the circulation flower baskets are relatively small, and it is impossible to thoroughly clean and quickly dry silicon wafers, resulting in poor cleaning effect of silicon wafers and excessive drying time. long question. Contents of the invention [0004] The object of the present invention is to provide a flower basket device for cleaning and drying silicon wafers, so as ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/673H01L21/687H01L21/67
CPCH01L21/67034H01L21/67051H01L21/67303H01L21/68792
Inventor 王相军
Owner SHANGHAI FUCHUAN AUTOMATION EQUIP CO LTD