Measuring device and measuring method of interaxial position error of precise two-dimensional turntable

Abstract

The invention provides a measuring device and a measuring method of an interaxial position error of a precise two-dimensional turntable, and belongs to the field of precision measurement. The measuring device comprises a semiconductor laser, a light source fixing base, a two-dimensional position sensor, a sensor fixing seat, a connecting plate, a two-dimensional angle adjustment frame, and an XZ two-axis translation lifting platform. The measuring method comprises the steps of: measuring rotation centers of pitch axes at two specified positions by using the laser and the two-dimensional position sensor fixed at a tail end of the pitch axis of the two-dimensional turntable; and directly and easily obtaining the interaxial position error of the turntable by comparing the difference between the coordinates of the two centers. By adopting the measuring device and the measuring method provided by the invention, high-precision direct measurement of the interaxial position error of the two-dimensional turntable is realized without being affected by uniaxial rotation error and other parameters on the measurement result; and meanwhile, the measurement process is simple, and the measurementprecision is high.

Description

Technical field [0001] The invention belongs to the field of precision measurement, and specifically relates to a device and method for measuring the position error between a two-dimensional turntable axis by using a semiconductor laser and a two-dimensional position sensor. Background technique [0002] The precision two-dimensional turntable is composed of two orthogonal precision rotary axis systems, the azimuth axis and the pitch axis. It is a key functional component in the fields of advanced manufacturing, test and measurement and precision instruments, such as five-axis machine tools, laser trackers, theodolites, robots, etc. . [0003] In addition to the inherent geometric errors and angle measurement system errors of each rotating axis, the position error between the two axes is also an important error. The position error between the axes includes: the disjoint error between the axes and the perpendicularity error between the axes. At present, the research on the factors ...

AI Technical Summary

Problems solved by technology

At present, the research on the factors affecting the accuracy of the turntable mainly focuses on the single-axis rotation error and angular position positioning error, while there are few quantitative measurement methods for the non-intersecting error between the axes and the perpendicularity error between the axes. Usually, complex mathematical models are established and multi-parameter measurements are used Indirect measurement is carried out in a way, because the measurement process is affected by the errors of other items, so the accuracy of the unknown quantity fitting cannot be effectively guaranteed

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