A device and method for measuring position error between axes of a precision two-dimensional turntable

Abstract

The invention discloses a measuring device and method for the position error between axes of a precision two-dimensional turntable, belonging to the field of precision measurement. The measuring device includes a semiconductor laser, a light source fixing base, a two-dimensional position sensor, a sensor fixing seat, a connecting plate, a two-dimensional angle adjustment frame and an XZ two-axis translation lifting platform. The measurement method is to use a laser fixed at the end of the pitch axis of the two-dimensional turntable and a two-dimensional position sensor to measure the rotation center of the pitch axis at two designated positions, and obtain the turntable directly and easily by comparing the difference between the two center coordinates. axis position error. The invention realizes high-precision direct measurement of the position error between two-dimensional turntable axes, and is not affected by other parameters such as single-axis rotation error on the measurement result; meanwhile, the measurement process is simple and the measurement accuracy is high.

Description

technical field [0001] The invention belongs to the field of precision measurement, and in particular relates to a device and method for measuring the position error between two-dimensional turntable axes by using a semiconductor laser and a two-dimensional position sensor. Background technique [0002] The precision two-dimensional turntable is composed of two orthogonal precision rotary axes of the azimuth axis and the pitch axis. It is a key functional component in the fields of advanced manufacturing, test measurement and precision instruments, such as five-axis machine tools, laser trackers, theodolites, robots, etc. . [0003] In addition to the inherent geometric error and angle measurement system error of each rotating axis, the position error between the two axes is also an important error. The position error between the axes includes: the disjoint error between the axes and the perpendicularity error between the axes. At present, the research on the factors affect...

AI Technical Summary

Problems solved by technology

At present, the research on the factors affecting the accuracy of the turntable mainly focuses on the single-axis rotation error and angular position positioning error, while there are few quantitative measurement methods for the non-intersecting error between the axes and the perpendicularity error between the axes. Usually, complex mathematical models are established and multi-parameter measurements are used Indirect measurement is carried out in a way, because the measurement process is affected by the errors of other items, so the accuracy of the unknown quantity fitting cannot be effectively guaranteed

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