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A detection device and detection method for depth information of optical element subsurface defects

A sub-surface defect and depth information technology, which is applied in the field of detection devices for sub-surface defect depth information of optical components, can solve problems such as low detection efficiency, difficult positioning, secondary damage, etc., to improve detection speed and reduce difficulty, improve The effect of detection speed

Active Publication Date: 2021-07-02
XIAN TECH UNIV
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Problems solved by technology

[0004] The invention provides a non-destructive detection device and detection method for the depth of subsurface defects of optical elements, so as to overcome the shortcomings of the prior art, such as extremely low detection efficiency, serious low benefit, secondary damage and difficult positioning

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  • A detection device and detection method for depth information of optical element subsurface defects
  • A detection device and detection method for depth information of optical element subsurface defects
  • A detection device and detection method for depth information of optical element subsurface defects

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Embodiment Construction

[0017] The present invention will be described in detail below with reference to the drawings and embodiments.

[0018] see figure 1 , a non-destructive optical element sub-surface defect depth detection device provided by the present invention is mainly composed of three parts: a light source modulation component, a defect depth detection component, a two-dimensional mobile platform, and a computer control platform. The light path of the light source modulation component Arranged perpendicular to the two-dimensional mobile platform 5, it includes an ultraviolet laser 1, a narrow-band filter 2, and a beam shaping component 3 from top to bottom; the optical path of the defect detection component and the light path of the light source modulation component are arranged at an angle, including A narrow band filter 6, a microscope lens 7 and a CCD detector 8; a computer control platform 9 is connected to the CCD detector 8 and the two-dimensional mobile platform 5 respectively.

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Abstract

The invention relates to a detection device and detection method for subsurface defect depth information of an optical element, which is composed of a light source modulation component, a defect depth detection component, a two-dimensional mobile platform and a computer control platform. The optical path of the light source modulation component is perpendicular to the two-dimensional The arrangement of the mobile platform includes ultraviolet lasers, narrow-band filters, and beam shaping components from top to bottom; the optical path of the defect detection component and the light path of the light source modulation component are arranged at an angle, including narrow-band filters, microscope lenses and CCD detection in sequence device; the computer control platform is connected with the CCD detector and the two-dimensional mobile platform respectively. The device and method of the invention overcome the disadvantages of extremely low detection efficiency, serious low benefit, secondary damage and difficult positioning in the prior art.

Description

technical field [0001] The invention relates to the technical field of precision optical detection, in particular to a detection device and a detection method for depth information of subsurface defects of an optical element. Background technique [0002] In the process of precision optical components such as grinding and polishing, it is easy to form defects such as cracks and pits on the surface and sub-surface of optical components. Generally, for precision optical components, the horizontal size of surface defects is on the order of submicron and nanometer. The longitudinal depth dimension is from a few microns to hundreds of microns. When the incident light hits the surface defect of the optical element, it will produce strong diffraction and scattering effects, which will greatly reduce the quality of the beam transmission energy in the optical system. Therefore, detection devices and detection techniques for surface and subsurface defects of optical components have b...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/22G01N21/88
CPCG01B11/22G01N21/88G01N21/8851G01N2021/8887
Inventor 田爱玲邱啸天张英鸽王红军王春阳刘雪莲刘丙才朱学亮
Owner XIAN TECH UNIV
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