Oxidation and annealing process for high-efficiency monocrystalline silicon cells

Abstract

The invention relates to an oxidation annealing process for a high-efficiency monocrystalline silicon battery, comprising the following steps: 1) entering a boat; 2) heating up; 3) vacuumizing the furnace tube and detecting leaks; 4) oxidation; ‑150mbar, annealing at 680‑710°C for 15‑20min and nitrogen gas 5000‑10000sccm; 6) cooling annealing, at pressure 100‑150mbar, temperature 620‑650°C for 15‑20min annealing and nitrogen gas 10000-20000sccm; 7) Inflation back pressure; 8) Out of the boat, the process ends. The present invention changes normal-pressure oxidation annealing into low-pressure oxidation annealing, and adopts constant temperature annealing and cooling annealing in the annealing process, so that the gas atmosphere in the process can be accurately controlled, the annealing environment is clean, and the cell efficiency is improved. .

Description

technical field [0001] The invention relates to the technical field of solar cells, in particular to an oxidation annealing process for high-efficiency monocrystalline silicon cells. Background technique [0002] In the solar cell industry, an oxidation process is often added after the etching process to improve the resistance to potential-induced attenuation of the cell. Later, with the development of the industry, many companies improved this oxidation process and added an annealing furnace to combine oxidation and annealing. to increase cell efficiency. [0003] The effects of cell oxidation and annealing are affected by the environmental atmosphere. At present, after various companies have adjusted and optimized in the early stage, they basically encounter bottlenecks in order to continue to improve efficiency in this process, and it is difficult to make breakthroughs. The main reason is that under normal pressure process conditions, the gas atmosphere in the tube is gr...

AI Technical Summary

Problems solved by technology

[0003] The effects of cell oxidation and annealing are affected by the environmental atmosphere. At present, after various companies have adjusted and optimized in the early stage, they basically encounter bottlenecks in order to continue to improve efficiency in this process, and it is difficult to make breakthroughs.

The main reason is that under normal pressure process conditions, the gas atmosphere in the tube is greatly affected by the power exhaust, and the gas atmosphere in the tube cannot be accurately controlled, which restricts the efficiency improvement of the cell in this process.

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