A kind of electronic skin with hierarchical pressure peak structure and preparation method thereof

An electronic skin and conductivity technology, applied in the field of sensors, can solve the problems of limited application prospects and low sensitivity, and achieve the effects of good repeatability, high sensitivity, and rapid response and recovery ability.

Active Publication Date: 2020-12-08
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, low sensitivity and irregular surface morphology of sandpaper templates limit their application prospects

Method used

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  • A kind of electronic skin with hierarchical pressure peak structure and preparation method thereof
  • A kind of electronic skin with hierarchical pressure peak structure and preparation method thereof
  • A kind of electronic skin with hierarchical pressure peak structure and preparation method thereof

Examples

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Effect test

preparation example Construction

[0054] The present invention also provides a method for preparing an electronic skin with a hierarchical pressure peak structure, which includes the following steps:

[0055] S1 prepares a flexible substrate with a pressure-sensitive layer sputtered on the surface:

[0056] First prepare a master template with a raised structure on the surface, wash and dry it, then use the master template to prepare an inversion mold and prepare an isolation layer on the surface of the inversion mold, then use the inverse mold with an isolation layer on the surface to prepare a flexible substrate, and finally in the flexible substrate. A pressure-sensitive layer is sputtered on the surface of the substrate to obtain a flexible substrate with a pressure-sensitive layer sputtered on the surface, specifically:

[0057] S11 master template production: the metal block is made into a master template with a raised structure array on the surface through a CNC grinding machine;

[0058] S12 Pretreatm...

Embodiment 1

[0081] This example is the preparation of electronic skin with hierarchical pressure peak structure based on magnetron sputtering gold, PVP nanowire network and micro-pyramid array. The following steps are specifically used for preparation:

[0082] 1) The metal block is made into a master template with a pyramid array on the surface by a CNC grinding machine;

[0083] 2) Sonicate the completed master template with ethanol for 10 minutes, then sonicate with deionized water for 10 minutes, then sonicate with ethanol for 10 minutes, and dry at 50°C;

[0084] 3) Pour the pre-mixed polydimethylsiloxane (PDMS) on the surface of the master template, and after drying, peel off to obtain the first mold;

[0085] 4) sputtering a gold layer on the surface of the first inverted mold;

[0086]5) Pour the pre-mixed polydimethylsiloxane (PDMS) on the surface of the first mold, after drying, peel off to obtain a flexible substrate with a micro-pyramid array, and the height of the micro-pyra...

Embodiment 2

[0094] This implementation is the preparation of electronic skin with hierarchical pressure peak structure based on graphene, PVP nanowire network and micro-hemispheric array. The following steps are specifically used for preparation:

[0095] 1) Prepare a master template with micro-hemispherical pits on a silicon wafer by photolithography;

[0096] 2) After the finished master template is sonicated with ethanol for 30 minutes, sonicated with deionized water for 15 minutes, then sonicated with ethanol for 20 minutes, and dried at 40°C;

[0097] 3) Pour the pre-mixed polydimethylsiloxane (PDMS) on the surface of the master template, and after drying, peel off to obtain the first mold;

[0098] 4) layered self-assembled graphene on the surface of the first inverted mold to form an isolation layer;

[0099] 5) Pour the pre-mixed polydimethylsiloxane (PDMS) on the surface of the first mold, and after drying, peel it off to obtain a flexible substrate with a micro-hemisphere array...

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Abstract

The invention belongs to the technical field of sensors, and discloses electronic skin having a classified voltage crest structure and a preparation method of the electronic skin. The electronic skincomprises a flexible substrate and an electronic encapsulating layer, wherein a protrusion structure is formed in the surface of the flexible substrate, a pressure sensitive induction layer is splashed to the surface of the protrusion structure, the electrode encapsulating layer lies in that a flexible film having electric conduction function is arranged on the lower surface, a reticular insulation net layer is prepared on the lower surface, the electronic encapsulating layer is arranged at the top of the protrusion structure, and the upper insulation net layer is jointed to the top of the protrusion structure; and a holding frame is also arranged between the insulation net layer and the edge of the flexible substrate, the upper surface of the holding frame is bonded with the insulation net layer, and the lower surface is bonded with the flexible substrate. The method comprises the following steps of preparing the flexible substrate to which the surface the pressure sensitive inductionlayer and the flexible substrate are sputtered; preparing the electronic encapsulating layer with the insulation net layer; and preparing the holding frame and performing encapsulating. The electronic skin being high in sensitivity and broad in induction range can be obtained, and has the advantages of being simple and easy to obtain, excellent in properties and the like.

Description

technical field [0001] The invention belongs to the technical field of sensors, and more specifically relates to an electronic skin with a hierarchical pressure peak structure and a preparation method thereof. Background technique [0002] The basic principle of flexible pressure sensors is to convert mechanical pressure excitations into readable electrical signals, which have attracted extensive attention because of their potential applications in wearable medical monitoring devices, soft robots, human-computer interaction, and electronic skin. For example, voice recognition is performed by analyzing the vibration signals of the vocal cords during vocalization, and heart function is diagnosed through the vibration signals of the heart. [0003] In order for the flexible pressure sensor to sense various pressure stimuli, the flexible pressure sensor must exhibit excellent performance in two key parameters: one is the detection range (stretchability) and the other is the sens...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): A61B5/0205A61B5/103G01L1/18
CPCA61B5/0205A61B5/021A61B5/08A61B5/1038G01L1/18
Inventor 黄禹吴从义荣佑民张田
Owner HUAZHONG UNIV OF SCI & TECH
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