Dual-bearing galvanometer and laser radar

A double bearing and bearing technology, applied in radio wave measurement systems, instruments, etc., can solve the problems of MEMS vibrating mirror damage, easy to be damaged by vibration or impact, low stiffness of torsion beam, etc., to achieve no rotating parts, small scanning angle, The effect of high vibration frequency

Active Publication Date: 2020-02-07
LEISHEN INTELLIGENT SYST CO LTD
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Problems solved by technology

However, this kind of torsion beam has low stiffness, and it is prone to stress concentration in the external vibration environment and exceeds the stress limit of the material, resulting in damage to the MEMS vibrating mirror; or, due to the low stiffness, the MEMS vibrating mirror is easily affected by vibration
As a result, the reliability of the MEMS galvanometer is poor, and it is easily damaged by vibration or shock, resulting in a short life of the lidar

Method used

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  • Dual-bearing galvanometer and laser radar
  • Dual-bearing galvanometer and laser radar
  • Dual-bearing galvanometer and laser radar

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Embodiment Construction

[0038] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for ease of description, the drawings only show a part but not all of the structure related to the present invention.

[0039] The improvement points of the embodiments of the present invention are: (1) In view of the short life of electromagnetic galvanometer low-frequency quasi-static scanning and easy damage, the fast axis and the slow axis are supported by bearings to achieve overall rotation instead of the traditional torsion beam The rigidity is rotated, and two pairs of magnetic structural parts are used to generate linear restoring force and damping motion, which can not only increase the rotation angle range, but also avoid material damage caused by vibration and im...

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Abstract

The invention discloses a dual-bearing galvanometer and laser radar. The dual-bearing galvanometer comprises a fixed seat, a galvanometer driving rack and a reflection lens, wherein the galvanometer driving rack comprises a fixed support, a fast-axis frame and a slow-axis frame, the reflection lens is arranged in the fast-axis frame, the fast-axis frame is rotatably connected to an inner side of the fixed support, the slow-axis frame is fixedly connected to an outer side of the fixed support, the galvanometer driving rack is rotatably connected to the fixed seat, the fast-axis frame twists around a first direction, the slow-axis frame twists around a second direction, and the first direction is perpendicular to the second direction. Therefore, the reliability of an MEMS galvanometer can beimproved, the vibration and impact resistant capability of the galvanometer is improved, so that the lifetime of the laser radar is favorably prolonged.

Description

[0001] The present disclosure claims the priority of a Chinese patent application filed with the Chinese Patent Office with an application number of 201911032839.2 on October 28, 2019. The entire content of the application is incorporated into the present disclosure by reference. Technical field [0002] The embodiment of the present invention relates to the technical field of lidar, in particular to a dual-bearing galvanometer and lidar. Background technique [0003] Lidar is a radar system that emits laser beams to detect the location and speed of target objects. With the development of lidar, Micro-Electro-Mechanical System (MEMS) galvanometer (also referred to as "galvanometer" in this article) is applied to lidar, and the development of solid-state lidar has become the mainstay of lidar in recent years. Development of new trends. MEMS galvanometer is a kind of micromirror made by MEMS technology. Its working mode is mostly resonant mode. It has the advantages of small size, ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01S7/481
CPCG01S7/481
Inventor 胡小波刘立福沈俭
Owner LEISHEN INTELLIGENT SYST CO LTD
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