Slit light source and vision inspection apparatus having the same

Abstract

The present invention relates to a slit light source and a vision inspection apparatus including the same, and more particularly, to a slit light source that generates slit-shaped light and irradiatesthe slit-shaped light onto an irradiation target, and the vision inspection apparatus including the slit light source. Disclosed is the slit light source (20), which is characterized by comprising: alight source unit (100) that generates light; an optical system (200) that condenses the light generated from the light source unit (100) at a preset magnification to form slit light, wherein the optical system (200) comprises: a parallel light forming lens unit (210) for converting light emitted from the light source unit (100) into parallel light; and a condensing lens unit (220) that condensesthe light passing the parallel light forming lens unit (210).

Description

technical field [0001] The present invention relates to a slit light source and a visual inspection device including the slit light source. More specifically, the present invention relates to a slit light source that generates slit-shaped light and irradiates an irradiation target, and a visual inspection device including the slit light source. Background technique [0002] Various inspections are performed during and after the process of semiconductor components, etc. to improve process yield, etc. [0003] Then, there is at least one of 2D and 3D visual inspection for inspection of inspection objects such as semiconductor devices. Light is irradiated to the inspection object, an image of the inspection object irradiated with light is acquired, and the acquired image is analyzed. [0004] Here, a visual inspection device for performing visual inspection generally includes: a light source that generates light of a fixed pattern from a light source to irradiate an inspection ...

AI Technical Summary

Problems solved by technology

[0007] However, the existing slit light source uses a slit member, and a part of the light blocked by the slit member causes light loss, so there is a need to use a light source with a large output.

[0008] In addition, if white light is used for the conventional light source, there is a problem that the boundary of the slit light cannot be clearly formed due to color difference, and there is a limitation in narrowing the width of the slit light.

[0009] Finally, the existing slit light source has the problem that it is difficult to change the beam width of the slit light according to the application of the slit light

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