Slit light source and vision inspection apparatus having the same

A slit light source and slit light technology, applied in the field of slit light source and visual inspection device, can solve the problems of light loss, narrow the limitation of slit light width, change the width of slit light beam, etc., and achieve the effect of easy adjustment

Inactive Publication Date: 2020-02-14
JT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] However, the existing slit light source uses a slit member, and a part of the light blocked by the slit member causes light loss, so there is a need to use a light source with a large output.
[0008] In addition, if white light is used for the conventional light source, there is a problem that the boundary of the slit light cannot be clearly formed due to color difference, and there is a limitation in narrowing the width of the slit light.
[0009] Finally, the existing slit light source has the problem that it is difficult to change the beam width of the slit light according to the application of the slit light

Method used

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  • Slit light source and vision inspection apparatus having the same
  • Slit light source and vision inspection apparatus having the same
  • Slit light source and vision inspection apparatus having the same

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Embodiment Construction

[0037] Hereinafter, a slit light source and a visual inspection device including the slit light source according to the present invention will be described below with reference to the drawings.

[0038] Such as figure 1 As shown, the visual inspection device of the present invention includes: a slit light source 20 , which is a light source for irradiating light to the object 10 to be irradiated;

[0039] The slit light source 20 shown as a structure for irradiating slit light to the irradiation object 10 will be described in detail below.

[0040] The image acquiring unit 30 shown can be any structure as long as it can acquire the image of the irradiation object 10 irradiated by the slit light through the slit light source 20 , such as a digital camera, a scanner, and the like.

[0041] The visual inspection device having the above-mentioned structure executes irradiating slit light through the slit light source 20 and acquiring an image through the image acquisition part 30...

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Abstract

The present invention relates to a slit light source and a vision inspection apparatus including the same, and more particularly, to a slit light source that generates slit-shaped light and irradiatesthe slit-shaped light onto an irradiation target, and the vision inspection apparatus including the slit light source. Disclosed is the slit light source (20), which is characterized by comprising: alight source unit (100) that generates light; an optical system (200) that condenses the light generated from the light source unit (100) at a preset magnification to form slit light, wherein the optical system (200) comprises: a parallel light forming lens unit (210) for converting light emitted from the light source unit (100) into parallel light; and a condensing lens unit (220) that condensesthe light passing the parallel light forming lens unit (210).

Description

technical field [0001] The present invention relates to a slit light source and a visual inspection device including the slit light source. More specifically, the present invention relates to a slit light source that generates slit-shaped light and irradiates an irradiation target, and a visual inspection device including the slit light source. Background technique [0002] Various inspections are performed during and after the process of semiconductor components, etc. to improve process yield, etc. [0003] Then, there is at least one of 2D and 3D visual inspection for inspection of inspection objects such as semiconductor devices. Light is irradiated to the inspection object, an image of the inspection object irradiated with light is acquired, and the acquired image is analyzed. [0004] Here, a visual inspection device for performing visual inspection generally includes: a light source that generates light of a fixed pattern from a light source to irradiate an inspection ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/01G01N21/95
CPCG01N21/01G01N21/95G01N2021/0112G01N21/8806G01N21/8803G02B27/0916G02B27/0966G02B27/30G01N2201/062
Inventor 柳弘俊李明国余弼相
Owner JT
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