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Bilateral dislocation differential confocal element parameter measuring method

The invention belongs to the technical field of optical imaging and detecting and relates to a bilateral dislocation differential confocal element parameter measuring method. The method includes the steps that dislocation differential subtracting processing is conducted on the two sides of a confocal axial characteristic data set measured by the starting points and the ending points of all various size parameters including the curvature radius, the lens thickness, the refractive rate, the focal distance and the interval, and therefore the positioning precision of the starting points and the ending points of the size parameters is improved, and the measuring precision of optical elements of the curvature radius, the lens thickness, the refractive rate, the focal distance, the interval and the like is improved. According to the bilateral dislocation differential confocal element parameter measuring method, due to the fact that two sections of data, close to the position of the full width at half maximum and very sensitive to axial displacement, of a confocal characteristic curve are used for conducting the dislocation differential subtracting processing, the position, calculated by the data sections, of the extreme point of the confocal characteristic curve is more sensitive and more accurate than the position, calculated through an existing confocal characteristic curve top fitting method, of the extreme point of the confocal characteristic curve, according to the result of the bilateral dislocation differential confocal element parameter measuring method, under the condition that the confocal element parameter system structure is not changed, the axial focusing capability, the signal-to-noise ratio and the like of the system can be obviously improved.
Owner:BEIJING INSTITUTE OF TECHNOLOGYGY
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