Touch sensor and its manufacture method

Abstract

The invention relates to a method for producing touch sensor, wherein said sensor comprises touch contact layer 1, space layer 2, and substrate layer 3 while they are made from flexible material; the touch contact layer 1 has micro cam array above; the space layer 2 is between the layers 2 and 3, while it has chamber array relative to the micro cam array; the contact faces between layers 1, 3 and 2 have several parallel row electrodes 4 and longitudinal electrodes 5 while they are vertical to each other; each crossed part has one switch sensitive unit; when the force of units are different, it will generate different switch signals to represent the surface state of matter. The invention has simple structure, high spatial resolution, and low cost.

Description

technical field

[0001] The invention belongs to the technical field of mechatronics, and in particular relates to a tactile sensor applied to mechatronics measurement technology, and also relates to a manufacturing method thereof. Background technique

[0002] The sense of touch is a synthesis of mechanical stimuli such as contact, impact, and pressure. A tactile sensor is a device that measures the interaction parameters (tactile, pressure, force, slip, thermal, etc.) of its own sensitive surface and external objects. The sensitive surface contains many tactile sensitive elements arranged in an array. Tactile sensors can be used for surface distributed contact measurement, shape recognition, surface height relief discrimination, active tactile perception, etc.

[0003] Traditional tactile sensors have been difficult to commercialize due to material and process limitations. The lack of flexibility of hard materials such as silicon and metal is one of the main reasons why t...

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