Packaging structure and packaging method for downward exposure of front surface of sensor chip
A sensor chip and packaging structure technology, which is applied in the manufacture of electrical solid state devices, semiconductor devices, semiconductor/solid state devices, etc., can solve the problems of affecting the stability of the sensor, the sensor has no protective structure, and the sensor protection function is insufficient, and the packaging steps are concise. , the process is simple, the effect of reducing the difficulty
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[0026] The present invention will be further explained below in conjunction with specific drawings and embodiments.
[0027] according to Figure 1-3 , the present invention proposes a packaging structure in which the front side of the sensor chip is exposed downward, including a base 1, a cavity is opened inside the base 1, a sensor chip body 2 is arranged inside the cavity, and a second sensor chip body 2 is arranged on the top of the base 1 A washer 3, the bottom inner wall of the base 1 is fixedly provided with a second washer 4, the inner wall of the second washer 4 is fixedly provided with a third washer 5, the bottom of the base 1 is penetrated with a screw rod 6, and the top of the base 1 is provided with There are two buffers.
[0028] In this embodiment, the buffer device includes a fixed cover 7, a chute 8, a fixed rod 9, a slide rod 10 and a buffer spring 11. The inner walls of both sides of the fixed cover 7 are provided with chute 8, and the inner walls of the t...
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