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Resistivity test method of semiconductor material

A test method and semiconductor technology, applied in the direction of analyzing materials, material resistance, measuring resistance/reactance/impedance, etc., can solve the problems of inconvenient inspection of errors, achieve the effect of improving measurement accuracy, reducing measurement errors, and reducing measurement errors

Inactive Publication Date: 2020-03-10
ANHUI UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the prior art, there are inevitably errors when performing the test, which is caused by impurities in the semiconductor material and the error caused by the measurement process is unavoidable, and the error is not easy to check

Method used

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  • Resistivity test method of semiconductor material
  • Resistivity test method of semiconductor material
  • Resistivity test method of semiconductor material

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Embodiment Construction

[0037] In order to enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0038] The present invention provides such Figure 1-3 A test method for resistivity of semiconductor materials shown, including power supply, ammeter, voltmeter, switch, sliding resistor R 0 and several wires, the power supply, ammeter, voltmeter, switch and sliding resistor R 0They are all electrically connected by wires. The method also includes an insulator mold 1, a cavity column 2 is provided inside the insulator mold 1, and a plurality of evenly distributed partition slides are provided on the side wall of the cavity column 2. groove 3, and the top of the partition chute 3 runs through the insulator mold 1, the partition chute 3 is slidably connected with a partition plate 4 inside, and the partition plate 4 is made of insulating material...

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Abstract

The invention discloses a resistivity test method of a semiconductor material. A power supply, an ampere meter, a voltmeter, a switch, a sliding resistor R0 and a plurality of wires are arranged, thepower supply, the ampere meter, the voltmeter, the switch and the sliding resistor R0 are electrically connected through the wires, and an insulator mold is also arranged. The method comprises the steps of: removing impurities on the surface of a semiconductor material, crushing the impurities to nano-particle dust for sieving, and performing measurement of the conductivity of the powder after homogenization treatment to reduce the measurement errors caused by impurities and uneven texture; respectively measuring and calculating the surface resistivity and the volume resistivity of the semiconductor material, and performing multi-solving to obtain an average value to further reduce the measurement errors, wherein the insulator mold and a combination structure thereof are arranged to facilitate multi-section test of the resistivity change of the semiconductor material, and finally, the accurate resistivity of the semiconductor material is finally obtained by considering a measurement temperature factor, the standard of a calculated value can be verified, and measurement precision is improved.

Description

technical field [0001] The invention relates to the technical field of resistivity testing, in particular to a resistivity testing method for semiconductor materials. Background technique [0002] The spreading resistance probe method is used to quantitatively measure the local conductivity of certain semiconductor materials, with high spatial resolution and a measurement sampling volume of 10-10cm 3 Around, the measurement repeatability is better than 1%. After the silicon wafer is angled, the change of resistivity within 30nm in the resolution depth direction can be measured by the spreading resistance method. Therefore, the extended resistance probe is a method for testing the quality of silicon materials and device production processes, and can also be used for resistivity distribution testing of other semiconductor materials such as gallium arsenide and indium chloride. [0003] In the prior art, when using a spreading resistance meter (hereinafter referred to as SRP)...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01R27/08G01N27/04
CPCG01N27/043G01R27/08
Inventor 赵绍博
Owner ANHUI UNIVERSITY
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