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Method and system for mocvd effluent abatement

A technology for waste gas flow and toxic substances, which is applied in the field of MOCVD emission reduction and systems, which can solve the problems of optimization, no large-scale, and easy occurrence.

Inactive Publication Date: 2020-03-10
紫石能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, the process is generally not used for large-scale (i.e., high-volume / high-throughput) manufacturing and is prone to problems because components of the process are not optimized for this type of operation

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  • Method and system for mocvd effluent abatement
  • Method and system for mocvd effluent abatement

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Embodiment Construction

[0017] The detailed description given below in connection with the accompanying drawings is intended as a description of various configurations and is not intended to represent the only configurations in which the concepts described herein may be practiced. The detailed description includes specific details for the purpose of providing a thorough understanding of various concepts. It will be apparent, however, to one skilled in the art that these concepts may be practiced without these specific details. In some instances, well-known components are shown in block diagram form in order to avoid obscuring the concepts.

[0018] In this disclosure, the terms "waste gas," "waste gas stream," "gas stream," and "exhaust gas" are used interchangeably to refer to one or more gases that result from the MOCVD process and require some form of treatment before being discharged. The flow of gases, particles and / or substances.

[0019] As mentioned above, the off-gas stream or off-gas from...

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Abstract

A system for removing toxic waste from an exhaust stream produced by a high-volume metal organic chemical vapor deposition (MOCVD) (120) operation, comprising: a first cold trap (130) configured to operate at a first pressure and condense and separate toxic materials in the exhaust stream for removal as solid waste; a pump (140) connected to the first cold trap (130) and configured to increase a pressure of the exhaust stream; a hot cracker (150) connected to the pump (140) and configured to decompose toxic materials remaining in the exhaust stream after the first cold trap (130); a second cold trap (160) connected to the hot cracker (150) and configured to operate at a second pressure higher than the first pressure and condense the decomposed toxic materials remaining in the exhaust stream for removal as solid waste; and a scrubber (170) connected to the second cold trap (160) and configured to absorb toxic materials remaining in the exhaust stream after the second cold trap (160). Also disclosed is a method of removing toxic waste from an exhaust stream produced by a high-volume metal organic chemical vapor deposition (MOCVD) (120) operation.

Description

technical field [0001] Aspects of the present disclosure relate generally to techniques for removing toxic species from exhaust gas streams, and more particularly to methods and systems for reducing emissions from metal organic chemical vapor deposition (MOCVD) processes. Background technique [0002] When using MOCVD technology, the waste gas must be treated to remove toxic substances, and this process is generally called effluent abatement. For GaAs MOCVD operations, these toxic substances include those containing arsenic (different forms of arsenic, such as arsine gas (AsH 3 ) and arsenic vapor) and some amount of gallium species. During this abatement process, the exhaust gas from the MOCVD operation first passes through a cold trap to condense and collect some toxic substances. The output of the cold trap is pumped to increase the pressure and then possibly passed through additional cold traps to ensure that all condensables are collected and removed. Any residual ar...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/44
CPCC23C16/4412B01D2258/0216B01D2257/553B01D2257/55B01D53/46B01D53/002B01D53/005B01D2257/108B01D53/14B01D8/00B01D53/24B01D53/64B01D53/75
Inventor 何甘洛瑞·华盛顿姚立强南建辉张新云
Owner 紫石能源有限公司
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