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Microchannel processing system based on liquid-assisted femtosecond laser online etching

A femtosecond laser and processing system technology, applied in the field of femtosecond laser applications, can solve problems such as complex three-dimensional structures, achieve high micro-channel processing, avoid processing stagnation, and high aspect ratio.

Inactive Publication Date: 2020-03-17
TSINGHUA UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to propose a microchannel processing system based on liquid-assisted femtosecond laser on-line etching, improve the structure of the existing microchannel processing system, and solve the problems existing in the existing traditional femtosecond

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  • Microchannel processing system based on liquid-assisted femtosecond laser online etching

Examples

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Example Embodiment

[0022] Example 1: Using KOH solution as etching solution, femtosecond laser is used to process microchannels in quartz glass samples.

[0023] The specific processing steps of this embodiment are as follows:

[0024] Sample preparation: Prepare a 10mm×20mm×2mm quartz glass sample, wash it with 99.9% absolute ethanol, and use it as a sample to be processed.

[0025] Optical path adjustment: Turn on the femtosecond laser 1, wait for 20-30 minutes, and then the laser output is stable, then press each optical path component figure 1 Place the optical platform sequentially, and then adjust the collimation of the femtosecond laser so that the femtosecond laser can irradiate on the edge of the quartz glass sample surface without focusing. Set the femtosecond laser pulse repetition frequency of the femtosecond laser 1 to 1000 Hz, and control the beam waist diameter of the femtosecond laser to 5 mm before focusing. Under the control of the six-dimensional translation stage 12, the focal pla...

Example Embodiment

[0028] Example 2: Using HF solution as etching solution, femtosecond laser is used to process microchannels in sapphire samples.

[0029] The specific processing steps of this embodiment are as follows:

[0030] Sample preparation: prepare a 10mm×10mm×1mm four-sided polished sapphire sample, wash it with 99.9% absolute ethanol, and use it as the subsequent sample to be processed.

[0031] Optical path adjustment: Turn on the femtosecond laser 1, wait for 20-30 minutes, and then the laser output is stable, then press each optical path component figure 1 Place the optical platform sequentially, and then adjust the collimation of the femtosecond laser so that it can illuminate the edge of the sapphire sample surface without focusing. Set the femtosecond laser pulse repetition frequency of the femtosecond laser 1 to 1000 Hz, and control the beam waist diameter of the femtosecond laser to 4 mm before focusing. Under the control of the six-dimensional translation stage 12, the focal plan...

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Abstract

The invention relates to a microchannel processing system based on liquid-assisted femtosecond laser online etching, and belongs to the technical field of femtosecond laser application. The micro-channel processing system comprises a femtosecond laser device, an optical component, a container, a six-dimensional translation stage, an industrial camera and the like; femtosecond laser emitted by thefemtosecond laser device is incident above a processing objective lens after passing through a collimation system, and is focused by the processing objective lens and then is irradiated on a sample tobe processed in the container on the six-dimensional translation stage. According to the microchannel processing system, due to the fact that femtosecond laser scanning modification or ablation is carried out in etching liquid and chemical etching is carried out synchronously, micro-channel ablation with high efficiency, high quality and high depth-to-diameter ratio can be realized, and direct processing of a complex 3D structure is completed.

Description

technical field [0001] The invention relates to a microchannel processing system based on liquid-assisted femtosecond laser on-line etching, and belongs to the technical field of femtosecond laser application. Background technique [0002] As a common structure, microfluidic system plays a very important role in the fields of biochip, chemical analysis, drug research, etc., and microchannel is the most important part of microfluidic system. Features play a vital role in research. As an emerging processing technology, femtosecond laser has great advantages in processing microchannel structures. [0003] Traditional femtosecond laser processing methods for microchannels mainly include femtosecond laser direct ablation of microchannels, liquid-assisted femtosecond laser ablation of microchannels, and femtosecond laser-assisted chemical etching of microchannels. Femtosecond laser direct ablation of microchannels is the simplest and most direct method, but the processed microch...

Claims

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Application Information

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IPC IPC(8): B23K26/362B23K26/122B23K26/064B23K26/03B23K26/70
CPCB23K26/032B23K26/064B23K26/122B23K26/362B23K26/702
Inventor 姜澜闫剑锋李佳群
Owner TSINGHUA UNIV
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