Lifting thimble assembly, electrostatic chuck and processing device with electrostatic chuck
A technology of electrostatic chuck and thimble, which is applied in the direction of circuits, discharge tubes, electrical components, etc., and can solve the problems of cooling gas discharge phenomenon, threatening the working stability and safety of electrostatic chucks, etc.
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[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0037] figure 1 A plasma processing apparatus is shown, comprising an evacuatable reaction chamber 150 surrounded by an outer wall 155 . The reaction chamber 150 is used for processing the substrate. An electrostatic chuck 100 is disposed at the bottom of the reaction chamber for supporting and fixing the substrate 130 . A gas injection de...
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